Lithium niobate photomodulator and manufacturing and packaging method thereof

Abstract

Provided are a lithium niobate photomodulator and a manufacturing and packaging method thereof. A waveguide structure is manufactured on a lithium niobate substrate through hydrogenated amorphous silicon, the size of a waveguide can be effectively reduced by means of the high refractive index of the amorphous silicon, and therefore the distance between metal electrodes on the lithium niobate photomodulator is reduced, and voltage needing modulating is low. A waveguide chip is preferentially manufactured by the hydrogenated amorphous silicon, and Si:H chains of the amorphous silicon can reduce optical losses. Due to the fact that the thickness of the hydrogenated amorphous silicon is adjusted, the photoelectric effect of the lithium niobate photomodulator can be maximized under the premise that the size of the waveguide is guaranteed. Due to that fact that the thickness of silicon dioxide and the thicknesses of the metal electrodes are controlled, good radio frequency matching can be guaranteed, and an optical fiber interface connected with the outside is achieved through waveguide lines penetrating through a waveguide layer; because all the waveguide lines are located in the waveguide layer, enough metal regions for packaging or testing can be reserved. The perfect packaging process can reduce the occurrence probability of the phenomenon of electric leakage, and the phenomenon that a humid environment leads to a short-circuit phenomenon is avoided.

Description

technical field [0001] The invention relates to the field of optical fiber communication transmission and communication, in particular to a lithium niobate optical modulator and a preparation and packaging method thereof. Background technique [0002] The main function of the optical modulator is to convert meaningless continuous light waves into high-frequency optical signals carrying effective information. Due to the high photoelectric effect of lithium niobate materials, lithium niobate optical modulators have become the most widely used optical modulators in existing systems. The main component of a lithium niobate optical modulator is a lithium niobate waveguide chip, and a lithium niobate optical modulator can be obtained by performing a certain packaging process on the lithium niobate waveguide chip. [0003] The existing lithium niobate waveguide chips are mainly prepared by titanium doping, etc., but due to the low contrast of the refractive index, the waveguide si...

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Problems solved by technology

[0006] For this reason, the technical problem to be solved by the present invention is that the size of the lithium niobate waveguide chip in the prior art is relatively large, the preparation process is relatively complicated, and the packaging process is relative

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