Thin film solid electrolyte amperometric SO 2 Gas sensor and preparation method

A solid electrolyte, gas sensor technology, applied in instruments, scientific instruments, material analysis by electromagnetic means, etc., can solve problems such as low operating temperature gas sensors, achieve high precision, realize intelligence, and promote the effect of reaction

Active Publication Date: 2017-02-22
XI AN JIAOTONG UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

At present, there is no Li 3 PO 4 SO in the solid electrolyte film 2 gas sensors, also not based on Li 3 PO 4 Micro-SO in solid electrolyte thin films 2 The study of the characteristics of the sensor and the principle of the current-mode structure, these make the miniature current-mode SO 2 Gas sensors have more obvious advantages than existing solid electrolyte gas sensors in terms of power consumption, stability, and volume

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  • Thin film solid electrolyte amperometric SO <sub>2</sub> Gas sensor and preparation method
  • Thin film solid electrolyte amperometric SO <sub>2</sub> Gas sensor and preparation method
  • Thin film solid electrolyte amperometric SO <sub>2</sub> Gas sensor and preparation method

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Embodiment Construction

[0032] Such as Figure 1-Figure 4 As shown, a micro amperometric SO based on thin film solid electrolyte 2 Gas sensors, from bottom to top are Al 2 o 3 Susceptor 1, Au thin film on susceptor 2, RuO 2 Temperature control element 4, Al 2 o 3 Substrate 3, Li 3 PO 4 Solid electrolyte layer 5, Au auxiliary electrode 6, Li 2 SO 4 / V 2 o 5 Reaction electrode 7, Li 2 TiO 3 / TiO 2 Reference electrode 8, diffusion barrier layer 9. In this structure, Al 2 o 3 The base 1 adopts a cross hollow structure in the middle ( Figure 4 ), with a thickness of about 10 microns, and Au thin films 2 are sputtered on the upper surfaces of the four corners to facilitate wiring. RuO 2 Temperature control element 4, Al 2 o 3 Substrate 3, Li 3 PO 4 Solid electrolyte layer 5, Au electrode film 6, Li 2 SO 4 / V 2 o 5 Reaction electrode 7, Li 2 TiO 3 / TiO 2 The reference electrode 8 and the diffusion barrier layer 9 form a chip. The temperature control element 4 includes two part...

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Abstract

The invention discloses a solid thin film electrolyte current mode SO2 gas sensor and a preparation process thereof. The preparation method of the gas sensor is characterized by comprising the following steps: manufacturing a RuO2 heating and temperature-measuring element on an Al2O3 ceramic substrate by virtue of a screen printing method; depositing a Li3PO4 solid electrolyte layer and an Au or Pt metal electrode on the other face of the Al2O3 ceramic substrate by virtue of a micro electro mechanical process; printing a reaction electrode Li2SO4 / V2O5 and a reference electrode Li2TiO3 / TiO2 above the electrolyte layer and the electrode and preparing a diffusion hindering layer above the reaction electrode; and finally forming the solid electrolyte SO2 gas-sensitive element. The prepared chip is sintered and fixed on the Al2O3 ceramic substrate by virtue of colloidal gold and Au is sputtered on the substrate for the convenience of leading wires. The sensor has two input signals and two output signals. The input signals on the Al2O3 ceramic substrate are used for supplying power to a heater while the output signals are used for feeding back temperature signals. The input signal of the gas-sensitive element is a constant voltage signal and the output current signal is related to the concentration of ambient SO2.

Description

technical field [0001] The present invention relates to a kind of SO 2 Gas sensor and its preparation method. Background technique [0002] In recent years, the development of MEMS (micro-electromechanical systems), nanotechnology, and information technology has made gas sensors develop in the direction of miniaturization, integration, low power consumption, real-time performance, and high safety. On the basis of thin-film functional materials, the development of miniaturized gas sensors is very different from macroscopic gas sensors. They have obvious advantages in terms of volume, power consumption, sensitivity, repeatability, mass production, cost, process stability, etc., and the preparation of gas sensors by combining thin-film solid electrolytes with miniaturization processes is in line with device integration and intelligence. , The inevitable development trend of functional diversification. [0003] Compared with the traditional electrochemical sensors with liquid...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/407
Inventor 王海容刘振陈迪吴桂珊
Owner XI AN JIAOTONG UNIV
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