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An air flotation transport device

A technology of air flotation and air intake holes, which is applied in the direction of transportation and packaging, conveyors, non-mechanical conveyors, etc., can solve the problems of small driving capacity and workpiece disturbance, achieve easy layout, large motion acceleration, and reduce static electricity pollution And the effect

Active Publication Date: 2017-01-04
阿尔贝斯(长兴)科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] Purpose of the invention: In order to overcome the deficiencies in the prior art, the present invention provides an air flotation transportation device, which can realize complete non-contact transportation, and solve the problem that the existing air flotation transportation device has a small driving ability and is easy to damage the workpiece. Disturbance problems, but also can reduce electrostatic pollution and stress concentration on the surface of the workpiece

Method used

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  • An air flotation transport device
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Embodiment Construction

[0030] The present invention will be further described below in conjunction with the accompanying drawings.

[0031] Such as Figure 3 to Figure 11 As shown, a kind of air flotation transportation device comprises a flat plate 11 with a smooth surface, the surface of the flat plate 11 is provided with a plurality of grooves 1-2 symmetrically distributed, and each groove 1-2 is separated from each other by the surface of the flat plate 11, And the number of grooves 1-2 is greater than 4. The grooves 1-2 on the surface of the plate 11 can be circular, square or cross-shaped, and the depth of the grooves 1-2 is greater than 200 microns and less than 500 microns. Air inlet 1-3 and air outlet 1-4 are provided in pairs in the groove 1-2, and screw thread is provided on the bottom surface of plate 11 where air inlet 1-3 and air outlet 1-4 are located, for connecting Gas connector for gas supply. Inlet holes 1-3 supply positive pressure, and air outlet holes 1-4 supply negative pre...

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Abstract

The invention discloses an air flotation transportation device, which comprises a flat plate, on which several symmetrically distributed grooves are arranged, each groove is provided with longitudinal air inlet holes and air outlet holes in pairs, and the air inlet The hole and the air outlet are respectively connected with the compressed air inlet pipe and the compressed air exhaust pipe, and the compressed air inlet pipe and the compressed air exhaust pipe communicate with the positive pressure and negative pressure of the air source through the electromagnetic reversing valve. In the present invention, since the air is in a horizontal flow state in the groove, the viscous force of the air flow can be utilized to the greatest extent to drive the movement of the workpiece to obtain a larger motion acceleration, which solves the problem that the existing air flotation transportation device has a small driving ability and is easy to operate. The problem of disturbance caused by the workpiece can be avoided, and it can also reduce electrostatic pollution and stress concentration on the surface of the workpiece.

Description

technical field [0001] The invention relates to an air flotation transportation device, and relates to the technical field of non-contact transportation in semiconductor wafer and glass substrate manufacturing industries. Background technique [0002] Liquid crystal glass substrates and semiconductor wafers must be transported safely and undamaged on the production line during the production process. At present, non-contact transportation is generally used to transport such workpieces. The usual method is to form a layer of air film between the workpiece and the surface of the conveying device, and suspend the workpiece above the device, so as to avoid the workpiece being transported during the conveying process. contact with the surface of the device and cause damage. Among the existing suspension transmission equipment, the more typical ones are Chinese patent application "A kind of air suspension device" (the application publication number is CN201961843U, and the applic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65G54/00
Inventor 钟伟
Owner 阿尔贝斯(长兴)科技有限公司
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