Ultrasonic 3D vibration compound elid precision grinding system and grinding method

Abstract

Ultrasonic 3D vibration composite ELID precision grinding system and grinding method. The grinding system includes a multi-channel ultrasonic generator, an ultrasonic stage, an automatic distance-adjusting electrode, a high-frequency DC pulse power supply, and a computer monitoring system. The computer monitoring system simultaneously collects the state characterization signals of ELID and 3D ultrasonic vibration, observes the respective working states of the composite processes and the degree of mutual influence, and then automatically or manually gives feedback control, so that the two processes can be dynamically, harmoniously and optimally matched. In the grinding process, the ultrasonic cavitation of the electrolyte will occur when the grinding wheel is in contact with the grinding surface of the workpiece, which can effectively promote the actual effect of the grinding wheel dressing, and the grinding force is more stable. The invention combines the ultrasonic grinding processing technology and the ELID grinding technology, realizes complementary advantages, overcomes the defects existing in a single process, and provides high-efficiency processing of ultra-smooth surfaces of hard and brittle materials in high-tech fields such as national defense and aerospace. Technical Support.

Description

technical field [0001] The invention belongs to the technical field of precision manufacturing, and in particular relates to an ultrasonic 3D vibration compound ELID precision grinding system and a grinding method. Background technique [0002] The high-efficiency processing technology of mirror surface of hard and brittle materials is an important branch of ultra-precision processing technology, which is of great significance to the development of cutting-edge science and technology such as aerospace, national defense, information, microelectronics and optoelectronics. At present, the research on the conventional technology of mirror surface processing of hard and brittle materials is relatively mature, but the fatal disadvantages are low efficiency and high cost. In order to improve the efficiency and surface quality, research on composite processing technologies such as ultrasonic grinding technology for hard and brittle materials, electrolytic online grinding wheel dress...

AI Technical Summary

Problems solved by technology

The disadvantage is that the grinding wheel is easy to block, the processing efficiency is low, the cost is high, and the non-conductive oxide peeled off from the diamond grinding wheel is easy to scratch the workpiece, etc.

[0004] Ultrasonic vibration precision grinding is a processing technology that combines ultrasonic vibration with ordinary grinding. The main advantage recognized in precision machining is that it can obtain precise ultra-precision surfaces while being efficient, but the disadvantage is to ensure the stability of the vibration of the acoustic system. The difficulty of performance, the grinding wheel cannot be trimmed on-line, and the nano-surface with extremely low roughness value (less than 10nm surface) cannot be obtained efficiently, such as the surface of ELID mirror grinding, etc. These problems also restrict the wide application of this technology in high-tech fields. main factors of application

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