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Electrostatic drive-based surface material contact characteristic test structure and test method thereof

A surface material, electrostatic drive technology, applied in the process of producing decorative surface effects, analysis materials, microstructure technology and other directions, can solve the problems of poor test adaptability of different materials, high measurement cost, expensive equipment, etc. Accuracy test, compact size, convenient operation effect

Inactive Publication Date: 2015-04-22
可优微环保新能源(南京)有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In the prior art, the special test equipment used for contact resistance measurement is expensive, bulky, and costly to measure, and has poor adaptability to testing different materials used in RF MEMS devices

Method used

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  • Electrostatic drive-based surface material contact characteristic test structure and test method thereof
  • Electrostatic drive-based surface material contact characteristic test structure and test method thereof
  • Electrostatic drive-based surface material contact characteristic test structure and test method thereof

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Embodiment Construction

[0037] Below in conjunction with accompanying drawing of description, the present invention will be further described.

[0038] Such as figure 1 , figure 2 and image 3 As shown, a surface material contact characteristic test structure based on electrostatic drive includes an insulating substrate 1, an electrostatic actuator 2, a king-shaped spring 3, a movable Contact electrode 4 and fixed contact electrode 5; also comprise the scale structure 6 that is arranged in the king-shaped spring 3 and be used for reading test scale; The test distance 10 of initial state is separated between described movable contact electrode 4 and fixed contact electrode 5 .

[0039] The electrostatic actuator 2, the king-shaped spring 3 and the movable contact electrode 4 are sequentially connected into one body, and are maintained in a suspended state by support; the fixed contact electrode 5 is also maintained in a suspended state by support; the movable contact electrode 4 and The facing si...

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Abstract

The invention discloses an electrostatic drive-based surface material contact characteristic test structure which comprises an insulating substrate, an electrostatic actuator, a spring shaped like a Chinese Character 'wang', a movable contact electrode and a fixed contact electrode which are suspended on the upper end surface of the insulating substrate, and a scale structure used for reading the test scales, wherein a test interval is formed between the movable contact electrode and the fixed contact electrode, and a to-be-tested surface material is arranged on the opposite side surfaces of the movable contact electrode and the fixed contact electrode; the electrostatic actuator, the spring shaped like a Chinese Character 'wang' and the movable contact electrode are close to the fixed contact electrode together by applying a voltage to generate electrostatic drive, so that the surface materials are contacted and generate contact force, and the contact characteristic test is realized. An electrostatic drive mode is adopted, the test structure is simple, feasible, convenient to operate, high in measurement speed and low in electrostatic actuation power consumption, the cost can be reduced, and the test structure is based on the MEMS processing technology, is simple in structure, small in size and high in universality, can be used for measuring different materials and is especially suitable for testing the surface material contact characteristics of RF MEMS devices.

Description

technical field [0001] The invention relates to a RF MEMS surface material contact characteristic test, in particular to an electrostatically driven surface material contact characteristic test structure and a test method thereof, which belong to the technical field of micro-electromechanical system manufacturing and performance reliability test. Background technique [0002] At present, the research on the contact characteristics of RF MEMS device surface materials has been widely concerned. It is directly related to the performance and reliability of resistive RF MEMS devices. The size and change of contact resistance directly affect the electrical performance of resistive RF MEMS devices. [0003] Taking the resistive RF MEMS switch as an example, the contact electrodes contact each other under electrostatic excitation to form a conductive RF circuit. The size of the contact resistance is related to the size of the contact force, and also related to the surface condition o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N33/00B81B7/02B81C1/00
Inventor 刘海韵
Owner 可优微环保新能源(南京)有限公司
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