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A getter pump using evaporative getter alloy

A getter pump and alloy technology, which is applied in the direction of pumps, liquid displacement machines, machines/engines, etc., can solve the problems of small gas absorption, inconvenient use, etc., to increase the effective area, increase the air intake, The effect of flexible external dimensions and installation methods

Active Publication Date: 2017-02-22
NANJING HUADONG ELECTRONICS VACUUM MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The present invention proposes a getter pump system using an evaporable getter alloy, and its purpose is to solve the problem of traditional getter pumps for CO, CO 2 , N 2 , O 2 The gas absorption is small, and it needs to be activated repeatedly, which is inconvenient to use.

Method used

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  • A getter pump using evaporative getter alloy
  • A getter pump using evaporative getter alloy

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] like figure 1 As shown, the getter pump system using evaporative getter alloy has a structure that the inner center of the housing 3 is a central shaft, and the two sides of the central shaft are multi-stage blades 4, and the lower end of the central shaft passes through The active metal source 1 and the activation heat source 2 are connected to the center of the base 5; the activation heat source 2 is connected above the base 5, and the active metal source 1 is connected above the activation heat source 2.

[0028] This example has strong versatility in the vacuum cavity.

[0029] The active metal source 1: adopts a disc-shaped stainless steel container with an outer diameter of 20 mm and a height of 5 mm, which contains mixed metal powder and is pressed into shape. The metal powder in this example is mixed with barium aluminum alloy powder and nickel powder at a ratio of 1:1. After pressing and forming, do 400 ℃ degassing treatment.

[0030] The activation heat sou...

Embodiment 2

[0037] Just replace the barium-aluminum alloy in the active metal source in Example 1 with calcium-aluminum alloy, and the others are the same as Example 1. This instance has a relatively long lifespan.

Embodiment 3

[0039] like figure 2 As shown, change the shell, central shaft, and multi-stage blades of Example 1 to the form shown in the figure, and the others are the same as Example 1. This example takes up less space and is easy to install.

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Abstract

The invention discloses a getter pump system with evapotranspiration type suction alloy adopted. The system is characterized by comprising evapotranspiration type suction alloy serving as an effective suction material, a suction alloy carrier and an activation heat source. The system has the advantages that the problem that some vacuum devices cannot accept reactive metal attaching is solved through a shell; the problem that the efficiency of sucking C, O, N and other types of gases through a traditional getter pump is low is solved through the main material of the evapotranspiration type suction material, the system does not need to be activated repeatedly, and all suction capacities can be released through one-time activation; the problem that part of the vacuum devices cannot activate a getter with high frequency is solved through the activation heat source, the effective area is increased through the inner structure design, and the suction rate and the suction amount are increased; the appearance size and the installing mode are flexible. By means of the getter pump system, the requirements of some devices for a getter pump in the vacuum field and the gas purification field can be met.

Description

technical field [0001] The invention relates to a getter pump using an evaporative getter alloy, which belongs to the field of vacuum and gas purification. Background technique [0002] The vacuum pump is used in the vacuum chamber to obtain and maintain vacuum. Vacuum pumps can be roughly divided into suction-type vacuum pumps and absorption-type vacuum pumps according to the pumping method. The suction type vacuum pump mainly obtains or maintains the vacuum by discharging the gas in the vacuum chamber, and the absorption type vacuum pump obtains or maintains the vacuum mainly by capturing and absorbing the gas in the vacuum chamber. Absorption vacuum pumps mainly include getter pumps, sputter ion pumps, cryogenic condensation pumps, titanium sublimation pumps, etc. Among them, the getter pump has the advantages of small size, flexible installation, low power consumption, and simple use. [0003] Some miniaturized, high-value, vacuum devices or gas purification devices w...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B37/02F04B37/04
Inventor 王浏杰薛函迎柴云川郭卫斌
Owner NANJING HUADONG ELECTRONICS VACUUM MATERIAL