MgO/ ZnO composite medium protecting film and preparation method thereof
A composite medium and protective film technology, which is applied in the manufacture of discharge tubes/lamps, cold cathodes, electrode systems, etc. Longevity, effect of reducing ignition voltage
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[0029] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0030] like figure 1 As shown, the present invention provides a MgO / ZnO composite dielectric protective film, the composite dielectric protective film includes a MgO film, and the MgO film is doped with ZnO nanoparticles dispersedly distributed. Among them, the thickness of the MgO film is about 171nm ( figure 1 a), the size of ZnO nanoparticles is about 10nm ( figure 1 b). In the present invention, ZnO nanoparticles are deposited by reactive magnetron sputtering method, and MgO film is sputtered on the surface of Si substrate by reactive magnetron sputtering method.
[0031] The invention also provides a preparation method of MgO / ZnO composite dielectric protective film, using the method of reactive magnetron sputtering to co-sputter MgO / ZnO composite thin film on Si substrate, and the reaction temperature is 160°C.
[0032] Specifically, a JPG-4...
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