A flexible pH sensor based on nano-gap electrodes and its manufacturing method

Abstract

A flexible pH sensor based on nano-gap electrodes and its manufacturing method, the flexible pH sensor includes a flexible substrate, an epoxy resin layer is spin-coated on the flexible substrate, and more than one pair of 50-500 nanometer electrodes are prepared on the epoxy resin layer Nano-gap electrodes, assembling carboxyl-functionalized single-walled carbon nanotubes between each pair of nano-gap electrodes, the manufacturing method is to first prepare carboxy-functionalized single-walled carbon nanotube suspensions, then prepare nano-gap electrodes, and then assemble carboxyl groups by dielectrophoresis Functionalized single-walled carbon nanotubes, and finally pre-treated the flexible pH sensor to remove the carboxyl-functionalized single-walled carbon nanotubes that are weakly connected to the nanogap electrode and retain the carboxyl-functionalized single-walled carbon nanotubes that have a strong interaction with the nanogap electrode Tube. The flexible pH sensor of the invention has the advantages of simple structure, wide application range, high sensitivity, fast response speed, low test voltage, compatibility with integrated circuits, and broad development prospects.

Description

technical field [0001] The invention relates to the technical field of nano-gap electrode sensor manufacturing, in particular to a flexible pH sensor based on a nano-gap electrode and a manufacturing method. Background technique [0002] The pH value is one of the most important monitoring indicators in various physical and chemical processes. With the development of science, this indicator more and more affects all experiments or processes related to solutions. For example, solutions used in various industries, agriculture, medicine and health, and environmental protection must detect H + Concentration, because this parameter may directly or indirectly affect important indicators such as reaction yield, product activity, and product structure. The application of pH measurement as a test technique is becoming more and more widespread. [0003] As a representative of pH sensors, ISFET (Ion Sensitive Field Effect Transistor) has developed rapidly and is gradually replacing ...

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Problems solved by technology

[0004] (1) With a rigid substrate, the sensor cannot be adhered to the shape, and the application range is limited, which cannot meet the needs of integrating environment-sensitive sensors on a flexible substrate;

[0005] (2) The electrode gap is too large, usually on the order of microns or tens of microns

This will cause the sensitivity and response time of the sensor to fail to meet the needs of high-precision sensors, and the operating voltage is high

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