High-power laser spot control system

Abstract

The invention discloses a high-power laser spot control system which comprises a high-power pulse laser device and a low-power laser device. A first deformable mirror, a first collimator, a first beam splitter and an optical confocal system are arranged on the central axis of the output light path of the high-power pulse laser device in sequence. A second deformable mirror, a second collimator, a second beam splitter, the optical confocal system and a CCD are arranged on the central axis of the output light path of a continuous laser device in sequence. A focusing light path of the optical confocal system is provided with an objective lens and a Z-axis micro moving table, and light intensity sensors are arranged on reflection light paths of the beam splitters. The two light intensity sensors and the CCD are connected with the input end of an FPGA module, a Z-axis driver driving a Z-axis motor is connected with the output end of the FPGA module, the Z-axis motor is connected with the Z-axis micro moving table, and the output end of the FPGA module is further connected with the pulse laser device and the continuous laser device. The high-power laser spot control system is reasonable in design, simple in structure, accurate in control and convenient to achieve.

Description

Technical field [0001] The invention belongs to the field of automatic control systems, and particularly relates to a control system for high-power laser spots. Background technique [0002] With the development of laser technology, lasers have been widely used in laser medicine, laser chemistry, materials processing, scientific research and other fields. High-power pulsed lasers are widely used in the cutting and welding of metal materials. High-power pulsed lasers The requirements for constant energy density during micro-polishing are very high, especially for the laser intensity and laser spot size on the surface of the processed workpiece. Unconstant laser intensity will affect the stability of the workpiece processing and make the processing process difficult to control. The size of the spot does not meet the processing requirements, which will also result in the unqualified processing of the workpiece, and real-time control and monitoring of the processing of the workpiece ...

AI Technical Summary

Problems solved by technology

[0002] With the development of laser technology, lasers are widely used in laser medicine, laser chemistry, material processing, scientific research and other fields. High-power pulsed lasers are widely used in metal material cutting, welding and other industries. High-power pulsed lasers Micro-polishing has high requirements for constant energy density, especially for the laser intensity and laser spot size on the surface of the processed workpiece. The unstable laser intensity will affect the stability of the workpiece processing, making the processing process difficult to control. If the size of the spot does not meet the processing requirements, it will also cause the processing of the workpiece to be unqualified, and the real-time control and monitoring of the workpiece processing process is also very important. The existing laser micro-polishing technology is not high in the real-time monitoring of the laser intensity in terms of constant energy density. , affecting the effect of forming light spots on the surface of the workpiece, the control accuracy is not high, the structure is relatively complicated, and the cost is high

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