A distance detection system for wafer state in loadport

Abstract

The invention relates to the technical field of control and detection of industrial automatic systems, and provides a distance detection system for states of wafers in a Load port. A first driving mechanism (2) drives a sliding table (1) to move along a guide track (5) in the up-down direction, so that a first connecting plate (3) is driven to move on a grating ruler (4); the grating ruler (4) records information and outputs first signals; the sliding table (1) slides along the guide track (5) in the up-down direction so as to drive a correlation type sensor (9) to move in the up-down direction; a second driving mechanism (14) drives the correlation type sensor (9) to swing towards a wafer box (7); the correlation type sensor (9) reads information and outputs second signals; the first signals and the second signals are processed; and the storage information of wafers in the wafer box (7) is measured. The output signals are detected through the sensor, the output signals and the output signals of the grating ruler (4) are processed, and the quantity, the positions and abnormal errors of the wafers stored in the wafer box can be detected accurately. The distance detection system for the states of the wafers in the Load port is high in detection precision, high in portability and easy to operate.

Description

technical field [0001] The invention relates to the technical field of control and detection of industrial automation systems, in particular to a distance detection system for wafer states in a Loadport. Background technique [0002] Today, with the rapid development of factory automation, in the wafer processing plant, the handling, picking and placing of wafer boxes has been automated. Loadport (wafer loading port), or foup opener (wafer box carrier), is an OEM tool Manufacturers offer an OEM configurable automated wafer handling solution that enables OEMs to configure end-user requirements on their existing platforms. The tool complies with the newly launched FOUP (Front Opening Unified Pod, wafer transfer box) interoperability standard and can be used as a key interface between IFE and wafer processing plants' automatic material handling systems or manual loading systems, suitable for semiconductor wafer manufacturing The process can also meet the needs of future factor...

AI Technical Summary

Problems solved by technology

In the existing technology, the distance between the wafers is generally calculated by using a mechanical mechanism with signal output. This method has poor portability, high error rate, and the accuracy is highly affected by the processing degree of the mechanism.

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