Position sensitive intelligent air foot

A gas foot and sensitive technology, applied in the field of position-sensitive intelligent gas foot, can solve the problems of complex system and high cost, and achieve the effect of reducing development difficulty and cost, low cost and high reliability

Active Publication Date: 2015-06-10
HARBIN INST OF TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the problem that a measuring device or instrument needs to be installed for the self-displacement measurement of the air foot, which causes the problem of complex system and high cost, and provides a position-sensitive intelligent air foot

Method used

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  • Position sensitive intelligent air foot

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specific Embodiment approach 1

[0021] Specific implementation mode one: the following combination figure 1 and figure 2 Describe this embodiment, the position-sensitive smart air foot described in this embodiment includes a gas sealing plate 1, an air foot substrate 2, fasteners 3, a processing circuit board 4, a photoelectric position sensor 5, and N throttle nozzles 6 and two O-rings 7, N=3,4,5,6,7,8,9;

[0022] The air sealing plate 1 and the air foot base plate 2 are connected together by fasteners 3;

[0023] An annular air cavity 2-1 is arranged on the upper surface of the air foot substrate 2, the upper surface is the surface connected to the air sealing plate 1, and N air flow holes 2-2 are uniformly arranged on the lower surface of the air foot substrate 2, Each air flow hole 2-2 communicates with the annular air cavity 2-1, and the central axes of N air flow holes 2-2 correspond to the center of the annular air cavity 2-1 respectively; each air flow hole 2-2 The bottom end is interference fitt...

specific Embodiment approach 2

[0029] Specific implementation mode two: the following combination figure 2 Illustrate this embodiment, this embodiment will further illustrate embodiment one, photoelectric position sensor 5 is made up of optical sensor and image processing chip; Processing circuit board 4 comprises digital processing chip and bus interface chip;

[0030] The optical sensor collects the optical image of the air bearing platform 8 at the current position, converts the optical image into a digital image, and then transmits it to the image processing chip. The image processing chip makes a difference between two adjacent digital images to obtain a motion displacement increment;

[0031] The digital processing chip integrates the movement displacement increment to obtain the current movement displacement of the air foot relative to the air bearing platform 8, and the bus interface chip converts the movement displacement into a bus form displacement, thereby obtaining the relative movement displac...

specific Embodiment approach 3

[0033] Specific implementation mode three: the following combination figure 2 This embodiment will be described. This embodiment will further describe the second embodiment. The processing circuit board 4 also includes a power supply chip.

[0034] The power supply chip is used to supply power to the optical sensor, image processing chip, digital processing chip and bus interface chip.

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Abstract

The invention discloses a position sensitive intelligent air foot, belongs to the technical field of air suspension and sensors, and aims to solve the problems of system complexity and high cost which are caused by the fact that a measurement device or instrument is needed to be mounted for own displacement measurement of the air foot. An annular air cavity is formed in the upper surface of an air foot substrate; the upper surface is a surface connected with an air sealing plate; N air flow through holes are uniformly formed in the lower surface of the air foot substrate; each air flow through hole is communicated with the annular air cavity; the middle axial lines of the N air flow through holes respectively correspond to the center of the annular air cavity; the bottom end of each air flow through hole is in interference fit with a throttling nozzle; each of the inner ring side and the outer ring side of the annular air cavity is respectively sealed by an O-shaped sealing ring arranged between the air sealing plate and the air foot substrate; an upper cavity and a lower cavity are formed in the center of the air foot substrate and are communicated with each other; a processing circuit board is arranged in the upper cavity; a photoelectric position sensor is arranged in the lower cavity. The position sensitive intelligent air foot is an air-suspended air foot.

Description

technical field [0001] The invention relates to a position-sensitive intelligent air foot, and belongs to the technical field of air suspension and sensors. Background technique [0002] Air suspension technology is widely used in precision measurement, high-precision position control, zero-gravity simulation and other fields. The air foot is a special air bearing based on air suspension technology, which can simultaneously realize rotation and two-dimensional translation in a plane when combined with an air bearing platform. The air-foot-based support system has the characteristics of high stiffness and zero friction, so it has been widely used in the fields of space zero-gravity environment simulation, precision assembly, and high-precision measurement. [0003] The traditional air foot does not have the ability to measure its own movement displacement. Therefore, the load supported by the air foot needs to be equipped with a certain position measuring device or instrumen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B64G7/00
Inventor 刘延芳齐乃明齐骥袁秋帆黄琳于灵慧
Owner HARBIN INST OF TECH
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