Position Sensitive Smart Air Foot
A gas foot and sensitive technology, applied in the field of position-sensitive intelligent gas foot, can solve the problems of complex system and high cost, and achieve the effect of reducing development difficulty and cost, low cost and high reliability
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specific Embodiment approach 1
[0021] Specific implementation mode 1: the following combination figure 1 with figure 2 To explain this embodiment, the position-sensitive smart air foot of this embodiment includes an air-sealing plate 1, an air foot substrate 2, a fastener 3, a processing circuit board 4, a photoelectric position sensor 5, and N throttle nozzles. 6 and two O-rings 7, N=3,4,5,6,7,8,9;
[0022] The air-sealing plate 1 and the air-foot base plate 2 are connected together by fasteners 3;
[0023] The upper surface of the air foot substrate 2 is provided with an annular air cavity 2-1, the upper surface is the surface connected with the air sealing plate 1, and the lower surface of the air foot substrate 2 is uniformly provided with N air flow through holes 2-2, Each air flow through hole 2-2 communicates with the annular air cavity 2-1, and the central axis of the N air flow through holes 2-2 respectively correspond to the center of the annular air cavity 2-1; The bottom end is interference fit wi...
specific Embodiment approach 2
[0029] Specific implementation manner 2: the following combination figure 2 To illustrate this embodiment, this embodiment will further explain the first embodiment. The photoelectric position sensor 5 is composed of an optical sensor and an image processing chip; the processing circuit board 4 includes a digital processing chip and a bus interface chip;
[0030] The optical sensor collects the optical image of the air bearing platform 8 at the current position, converts the optical image into a digital image, and transmits it to the image processing chip. The image processing chip makes the difference between the digital images obtained twice to obtain the movement displacement increment;
[0031] The digital processing chip integrates the movement displacement increment to obtain the current movement displacement of the air foot relative to the air floating platform 8. The bus interface chip then converts the movement displacement into a bus form displacement, thereby obtaining t...
specific Embodiment approach 3
[0033] Specific implementation manner three: the following combination figure 2 To describe this embodiment, this embodiment will further explain the second embodiment, the processing circuit board 4 also includes a power chip,
[0034] The power chip is used to supply power for the optical sensor, image processing chip, digital processing chip and bus interface chip.
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