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Vibration sensor and production method thereof

A vibration sensor, polymer technology, applied in sensors, evaluation of respiratory organs, medical science, etc., can solve problems such as poor sensitivity and poor low-frequency response performance

Inactive Publication Date: 2015-06-24
NEWNAGY TANGSHAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In particular, the vibration sensor is one of the commonly used tools for detecting breathing and heartbeat at present, but because the existing vibration sensors generally have the problem of poor low-frequency response performance, the sensitivity of detecting low-frequency vibrations such as breathing and heartbeat is poor

Method used

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  • Vibration sensor and production method thereof
  • Vibration sensor and production method thereof

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Experimental program
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Effect test

Embodiment 1

[0146] The size of the vibration sensor in this embodiment is 30 mm×12 mm, and the total thickness is about 400 μm. The vibration sensor includes a first electrode layer 21, a first high molecular polymer insulating layer 22, a second high molecular polymer insulating layer 23 and a second electrode layer 24 stacked in sequence, such as image 3 with Figure 4 shown.

[0147] The material used for the first electrode layer 21 and the second electrode layer 24 is aluminum foil with a thickness of 50 μm. The first polymer insulating layer 22 is a composite polymer layer, and the material used is a composite polymer composed of polyethylene terephthalate film (Yongtai Plastic) and polydimethylsiloxane film (Yongtai Plastic). Film with a thickness of 150 μm. The second polymer insulating layer 23 is a single polymer layer, and the material used is polyethylene terephthalate film (Yongtai Plastics), with a thickness of 100 μm. The side of the first high molecular polymer insula...

Embodiment 2

[0152] The size of the vibration sensor of this embodiment is 30 mm×12 mm, and the total thickness is about 400 μm. The vibration sensor includes a first electrode layer 11, a first polymer insulating layer 12, and a second electrode layer 13 that are stacked in sequence, such as figure 1 with figure 2 shown.

[0153] The material used for the first electrode layer 11 and the second electrode layer 13 is copper foil with a thickness of 100 μm. The first polymer insulating layer 12 is a composite polymer layer, and the material used is a composite polymer film (Yongtai Plastics) composed of polyethylene terephthalate film and polypropylene film, with a thickness of 130 μm. On the opposite side of the first high molecular polymer insulating layer 12 and the second electrode layer 13, a diamond-shaped protrusion structure is provided, the height of the protrusion is 50 μm, the length of the long diagonal of the rhombus is 0.1 mm, and the distance between two adjacent rhombus ...

Embodiment 3

[0157] The size of the vibration sensor of this embodiment is 30mm×12mm, and the total thickness is about 1mm. The vibration sensor 3 includes a first electrode layer 31, a first high molecular polymer insulating layer 32, an intervening film layer 33, a second high molecular polymer insulating layer 34 and a second electrode layer 35 stacked in sequence, such as Figure 5 with Image 6 shown.

[0158] The material used for the first electrode layer 31 is copper foil with a thickness of 70 μm, and the material used for the second electrode layer 35 is tungsten with a thickness of 130 μm. The first high molecular polymer insulating layer 32 and the second high molecular polymer insulating layer 34 are both single polymer layers, made of polyethylene terephthalate film (Yongtai Plastics), with a thickness of 100 μm. The intermediate film layer 33 is a composite polymer layer, and the material used is a composite polymer film composed of polyethylene terephthalate film (Yongtai...

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Abstract

The invention provides a vibration sensor and a production method thereof. The vibration sensor comprises a first electrode layer, a first polymer insulating layer and a second electrode layer which are sequentially stacked, wherein a frame structure which can vibrate is disposed between the first polymer insulating layer and the second electrode layer; a second polymer insulating layer can be added between the first polymer insulating layer and the second electrode layer to allow frame structure to be formed between the first polymer insulating layer and the second polymer insulating layer; a middle electrode layer or a middle thin film layer can be further added between the first polymer insulating layer and the second polymer insulating layer, and the frame structures can be formed among the layers. The vibration sensor is excellent in low frequency response performance.

Description

technical field [0001] The invention relates to a vibration sensor, in particular to a breathing and heartbeat vibration sensor and a preparation method thereof. Background technique [0002] Vibration sensors, or piezoelectric sensors, are sensors made of piezoelectric effects produced by piezoelectric materials. They have been widely used in many fields such as acoustics, medical treatment, industry, transportation, security, etc., and are gradually changing people's lives. and working methods have become the trend of social development. When a piezoelectric material is deformed (including bending and stretching deformation) by an external force in a certain direction, charges will be generated on its surface due to the polarization of internal charges. Piezoelectric materials can be divided into piezoelectric single crystal, piezoelectric polycrystalline and organic piezoelectric materials. Polarized polyvinylidene fluoride (PVDF), polyvinylidene fluoride and polytrifluo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B5/0245A61B5/08
CPCA61B5/0205
Inventor 王竹林同福赵豪
Owner NEWNAGY TANGSHAN
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