High-temperature thin-film thermocouple temperature sensor

Abstract

The invention relates to a high-temperature thin-film thermocouple temperature sensor manufactured by the vacuum film technology. The high-temperature thin-film thermocouple temperature sensor is that the part of which the temperature is to be detected is selected from a high-temperature detecting material; the specific shape of a Pt thermocouple electrode and a PtRh thermocouple electrode; then the processes of processing a metal mask, preparing an Al2O3 insulating layer, preparing a Pt thermocouple film, preparing a PtRh thermocouple and preparing an Al2O3 insulating protecting layer are sequentially carried out to prepare the micron or submicron thin-film thermocouple temperature sensors employing the Pt material and the PtRh material. Compared with the prior art, the high-temperature thin-film thermocouple temperature sensor has the advantages of being reasonable in structure, convenient to operate, long in service life, fast to respond in temperature detection, and high in temperature detection accuracy, and the upper limit of temperature detection is up to 1200 DEG C.

Description

technical field [0001] The invention belongs to the technical field of manufacturing temperature measuring devices, and relates to a micron or submicron-scale high-temperature thermocouple temperature sensor composed of two metal films, in particular to a high-temperature thin-film thermocouple temperature sensor made by vacuum film technology. Background technique [0002] High-temperature structural materials generally work in a high-temperature environment with a temperature as high as 1000°C. For the temperature measurement of these high-temperature structural materials, the traditional measurement method mostly uses non-contact high-temperature radiation temperature measurement, but this temperature measurement method has temperature measurement The disadvantages of low precision and slow response time are not conducive to online high temperature measurement. The currently known online real-time temperature measurement mainly uses a structural wire thermocouple temperat...

AI Technical Summary

Problems solved by technology

[0002] High-temperature structural materials generally work in a high-temperature environment with a temperature as high as 1000°C. For the temperature measurement of these high-temperature structural materials, the traditional measurement method mostly uses non-contact high-temperature radiation temperature measurement, but this temperature measurement method has temperature measurement The shortcomings of low precision and slow response time are not conducive to online high temperature measurement

The currently known online real-time temperature measurement mainly uses a structural wire thermocouple temperature sensor that can be embedded in the material for online real-time temperature measurement. The thermocouple temperature sensor consists of two metal thermocouples of different materials. The wire is welded together, but the disadvantage of using this structural wire thermocouple temperature sensor for temperature measurement is that it needs to destroy the material structure, which will not only affect the performance of the material at high temperature, but also slow the response time of temperature measurement. Therefore, the adaptability of this structural wire thermocouple temperature sensor for temperature measurement is not high.

At present, there is another online real-time temperature measurement method that uses wire type to weld the thermocouple temperature sensor on the metal sheet, and then paste the metal sheet on the surface of the material for temperature measurement. The disadvantage of this temperature measurement method is: due to the metal sheet It is inconsistent with the thermal expansion coefficient of the structural material. Under the condition of high temperature and high temperature rise rate, the adhesive layer between the metal sheet and the structural material will generate relatively large thermal stress, and it is prone to local glue opening or even falling off, causing the temperature measurement point to float, thus Seriously affect the accuracy of temperature measurement. In addition, when using this kind of wire thermocouple temperature sensor for temperature measurement, there are also problems of slow temperature measurement response time and low temperature measurement upper limit.