Array-type gamma irradiation dosimeter of FBAR structure on diaphragm

Abstract

The invention discloses an array-type gamma irradiation dosimeter of a FBAR structure on a diaphragm. The array-type gamma irradiation dosimeter comprises a detection element, a composite thin film, and a Si substrate. The detection element is disposed on the upper part of the composite thin film, and the composite thin film is used to support the detection element, and the Si substrate is disposed on the lower part of the composite thin film. The detection element comprises a plurality of FBAR, which are in an array-type arrangement, and are disposed on the composite thin film. Each of the FBAR comprises, from bottom to top, a bottom electrode, a piezoelectric layer, and a top electrode sequentially. An irradiation sensitive layer is disposed between each of the piezoelectric layers and each of the bottom electrodes, or is disposed between each of the piezoelectric layers and each of the top electrodes, and the bottom electrodes are tightly attached to the upper surface of the composite thin film. The Si substrate is provided with a plurality cavities, which are respectively corresponding to the irradiation sensitive layers in a vertical direction. The cavities are used to form the volume acoustic wave reflection interfaces, and the composite thin film areas corresponding to the cavities are the composite thin film suspension areas. The array-type gamma irradiation dosimeter has advantages of small size, high sensitivity, good temperature stability, good manufacturability, and ability of detecting irradiation dose distribution.

Description

technical field [0001] The invention belongs to the field of microelectromechanical system devices, in particular to an array type gamma radiation dosimeter of FBAR (film bulk acoustic-wave resonators) on a diaphragm, the array type gamma radiation dosimeter has a small size , high sensitivity, detectable radiation dose distribution, good temperature stability and good manufacturability. technical background [0002] Ionizing radiation sensing has a large number of applications. In large-scale high-energy physics experiments, high-dose radiation testing is an important means of understanding the degradation of silicon-based electronic devices. In nuclear material detection and security applications, where radiation sources may be partially obscured, low-dose sensors are required. In astronomy, the flux and direction of high-energy radiation needs to be measured. In radiotherapy for the treatment of cancer, it is necessary to determine the precise location and magnitude of ...

AI Technical Summary

Problems solved by technology

The disadvantages of this scheme are: 1. FBAR does not have a temperature compensation layer, and the temperature has a great influence on the resonance frequency of FBAR; 2. Since there is only a single detection element, it is impossible to detect the distribution of radiation dose

The main disadvantage of this solution is that it requires a large inductor for wireless communication, thus limiting the miniaturization potential of this device

The disadvantage of this scheme is that effective post-processing is required to accurately determine the absorbed dose of radiation

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