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Sodium-doped molybdenum rotating target material and preparation method thereof

A rotating target and sodium doping technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of low conversion efficiency and high cost of copper indium gallium selenide thin film, and achieve low cost and relative density. High, improve the effect of conversion efficiency

Active Publication Date: 2015-09-09
无锡舒玛天科新能源技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing two-step sputtering method usually uses copper gallium or copper / gallium target and indium target as the absorbing layer, and molybdenum as the back electrode, and the obtained copper indium gallium selenide thin film has low conversion efficiency and high cost

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  • Sodium-doped molybdenum rotating target material and preparation method thereof

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Effect test

Embodiment 1

[0025] The sodium-doped molybdenum rotating target is composed of molybdenum atoms, sodium atoms and oxygen atoms, and the ratio of molybdenum atoms, sodium atoms and oxygen atoms is 85:5:10.

[0026] Its preparation method comprises the following steps:

[0027] (1) molybdenum trioxide and sodium hydroxide with a molar ratio of 1:1 having a purity of 99.99% or more react in water at 50°C to generate an aqueous solution of sodium molybdate, which is heated to 120°C to evaporate the aqueous solution of sodium molybdate to dryness to obtain Sodium molybdate;

[0028] (2) Precisely weigh anhydrous sodium molybdate and molybdenum powder so that the ratio of molybdenum atoms, sodium atoms and oxygen atoms is 85:5:10, mix them evenly, place them in a ball mill jar, and add balls, in which anhydrous molybdenum The ratio of the total mass of sodium bicarbonate and molybdenum powder to the total mass of balls added to the ball mill is 1:10, ball milled for 180min under the protection ...

Embodiment 2

[0032] The sodium-doped molybdenum rotating target is composed of molybdenum atoms, sodium atoms and oxygen atoms, wherein the ratio of molybdenum atoms, sodium atoms and oxygen atoms is 91:3:6.

[0033] Its preparation method comprises the following steps:

[0034] (1) molybdenum trioxide and sodium hydroxide with a molar ratio of 1:2 having a purity of 99.99% or more react in water at 70°C to generate an aqueous solution of sodium molybdate, which is heated to 100°C to evaporate the aqueous solution of sodium molybdate to dryness to obtain Sodium molybdate;

[0035] (2) Precisely weigh anhydrous sodium molybdate and molybdenum powder so that the ratio of molybdenum atoms, sodium atoms and oxygen atoms is 91:3:6, mix them evenly, place them in a ball mill jar, and add balls, in which anhydrous molybdenum The ratio of the total mass of sodium bicarbonate and molybdenum powder to the total mass of balls added to the ball mill is 1:100, ball milled for 30 minutes under the prot...

Embodiment 3

[0039] The sodium-doped molybdenum rotating target is composed of molybdenum atoms, sodium atoms and oxygen atoms, wherein the ratio of molybdenum atoms, sodium atoms and oxygen atoms is 99:1 / 3:2 / 3.

[0040] Its preparation method comprises the following steps:

[0041] (1) molybdenum trioxide and sodium hydroxide with a molar ratio of 1:3 having a purity of 99.99% or more react in water at 60°C to generate an aqueous solution of sodium molybdate, which is heated to 110°C to evaporate the aqueous solution of sodium molybdate to dryness to obtain Sodium molybdate;

[0042] (2) Accurately weigh anhydrous sodium molybdate and molybdenum powder so that the ratio of molybdenum atoms, sodium atoms and oxygen atoms is 99:1 / 3:2 / 3, put them in a ball mill jar after mixing, and add balls, The ratio of the total mass of anhydrous sodium molybdate and molybdenum powder to the total mass of balls added to the ball mill is 1:50, ball milled for 100min under the protection of argon, and the...

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Abstract

The invention provides a sodium-doped molybdenum rotating target material, which is composed of molybdenum atoms, sodium atoms and oxygen atoms, wherein the oxygen atomicity accounts for 85-99% of total atomicity, others are sodium atoms and oxygen atoms, and the quantity ratio of the sodium atoms and oxygen atoms is 1: 2. The invention also provides a preparation method of the sodium-doped molybdenum rotating target material. According to the sodium-doped molybdenum rotating target material, a sodium element is doped in a molybdenum back electrode, transition efficiency of a CIGS film battery is greatly increased, production cost is reduced, and large scale industrialization of the CIGS film battery can be carried out. The preparation method takes molybdenum trioxide, sodium hydroxide and molybdenum metal as raw materials, and processes of reaction, ball milling, sieving, plasma spraying under vacuum or protective atmosphere are carried out to prepare the sodium-doped molybdenum rotating target material. The method has the advantages of simple process and low cost, and is adapted to industrial production, the relative density of the prepared target material can reach more than 95%, oxygen density is less than 250ppm, and length can reach 4000 millimeters.

Description

technical field [0001] The invention belongs to the field of solar energy application equipment, in particular to a method for preparing a sodium-doped molybdenum rotating target. Background technique [0002] Manufacturing of solar panels has expanded rapidly over the past few decades. In 2011, the growth rate of the solar energy industry in the United States was as high as 109%, which is second to none in the field of new energy technologies. As the preferred product of thin-film solar cells, copper indium gallium selenide thin film solar cells are developing rapidly in the field of solar panels, which are usually provided with a molybdenum layer and a copper indium gallium selenide thin film in sequence on a rigid glass substrate or a flexible stainless steel plate. Absorber layer, cadmium sulfide buffer layer, intrinsic zinc oxide, aluminum-zinc oxide window layer and surface contact layer. According to the research report of Lux Research, in 2011, the CIGS thin-film s...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C4/06C23C4/12
Inventor 徐从康
Owner 无锡舒玛天科新能源技术有限公司
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