A control method to solve the versatility of substrate transport trolley

Abstract

The invention relates to the field of vacuum coating, in particular to a control method for solving the universality problem of a base plate carrying trolley. The control method is characterized by at least including the following steps that an optical fiber sensor is installed in front of the grasping position of a mechanical arm, and the distance between the origin position of the base plate carrying trolley and the installation position of the optical fiber sensor is measured through the optical fiber sensor; the distance is compared with the reference distance between the origin position of the base plate carrying trolley and the installation position of the optical fiber sensor, and a difference value is calculated; and by means of the difference value, the coordinates of a base plate carried by the base plate carrying trolley are compensated and corrected. The method has the advantages that universality of the material carrying trolley is achieved by detecting the front position and the rear position of the base plate carrying trolley, accuracy of the carrying position is improved, and the fault rate of carrying is reduced; detection on the front position and the rear position of the material carrying trolley is added through electrical design; the position of the material carrying trolley is automatically compensated and the coordinates of the positions are updated in real time through software; and the universality problem of the material carrying trolley is solved.

Description

technical field [0001] The invention relates to the field of vacuum coating, in particular to a control method for solving the versatility of a substrate transport trolley. Background technique [0002] At present, the transfer trolley is usually used to transport the substrate to the vacuum coating chamber for subsequent coating operations, but the transport trolley needs to be replaced or replaced due to damage, obsolete or other equipment problems. At this time, because the parts of each transport trolley have different errors in processing and assembly, the transport accuracy of the trolley also brings a certain deviation, which will have a negative impact on the operation of subsequent equipment and easily cause equipment overload alarms And hardware damage, greatly reducing the efficiency of equipment automation. Contents of the invention [0003] The object of the present invention is to provide a control method that solves the versatility of the substrate transfer...

AI Technical Summary

Problems solved by technology

At this time, because the parts of each transport trolley have different errors in processing and assembly, the transport accuracy of the trolley also brings a certain deviation, which will have a negative impact on the operation of subsequent equipment and easily cause equipment overload alarms and hardware damage, greatly reducing the efficiency of equipment automation

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