Steel cylinder filling device and method for high-purity arsine

A pure arsine and steel cylinder technology, which is applied in the field of high-purity arsine cylinder filling system, can solve the problems of small output and no high-purity arsine filling system, and achieve the effect of reducing emissions

Inactive Publication Date: 2015-09-23
SHANGHAI ZHENGFAN TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to technical reasons, my country can only produce arsine with a purity of about 3N-4N, and the output is very small, so there is no high-purity arsine filling system in China.

Method used

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  • Steel cylinder filling device and method for high-purity arsine

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Such as figure 1 Shown is a schematic structural diagram of a high-purity arsine cylinder filling device. The high-purity arsine cylinder filling device includes a first pipe 7, one end of which is used to connect to the source gas cylinder 1 , The other end of the first pipe 7 is connected to the upper end of the cooling coil, the cooling coil is placed in the cooling tank 2, the lower end of the cooling coil is connected to one end of the second pipe 8, and the other end of the second pipe 8 is used for Connected to the steel cylinder 3 to be filled. The first pipe 7, the cooling coil and the second pipe 8 constitute the main pipe. The second pipe 8 is connected to a branch pipe 9, and the branch pipe 9 is connected to the cold trap collection steel bottle 5. With the vacuum pump 4, the branch pipeline 9 is also connected with a high-purity helium source and a tail gas discharge port. The steel cylinder 3 to be filled is arranged on the steel cylinder scale 6. The co...

Embodiment 2

[0035] Such as figure 1 Shown is a schematic structural diagram of a high-purity arsine cylinder filling device. The high-purity arsine cylinder filling device includes a first pipe 7, one end of which is used to connect to the source gas cylinder 1 , The other end of the first pipe 7 is connected to the upper end of the cooling coil, the cooling coil is placed in the cooling tank 2, the lower end of the cooling coil is connected to one end of the second pipe 8, and the other end of the second pipe 8 is used for Connected to the steel cylinder 3 to be filled. The first pipe 7, the cooling coil and the second pipe 8 constitute the main pipe. The second pipe 8 is connected to a branch pipe 9, and the branch pipe 9 is connected to the cold trap collection steel bottle 5. With the vacuum pump 4, the branch pipeline 9 is also connected with a high-purity helium source and a tail gas discharge port. The steel cylinder 3 to be filled is arranged on the steel cylinder scale 6. The co...

Embodiment 3

[0045] Such as figure 1 Shown is a schematic structural diagram of a high-purity arsine cylinder filling device. The high-purity arsine cylinder filling device includes a first pipe 7, one end of which is used to connect to the source gas cylinder 1 , The other end of the first pipe 7 is connected to the upper end of the cooling coil, the cooling coil is placed in the cooling tank 2, the lower end of the cooling coil is connected to one end of the second pipe 8, and the other end of the second pipe 8 is used for Connected to the steel cylinder 3 to be filled. The first pipe 7, the cooling coil and the second pipe 8 constitute the main pipe. The second pipe 8 is connected to a branch pipe 9, and the branch pipe 9 is connected to the cold trap collection steel bottle 5. With the vacuum pump 4, the branch pipeline 9 is also connected with a high-purity helium source and a tail gas discharge port. The steel cylinder 3 to be filled is arranged on the steel cylinder scale 6. The co...

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Abstract

The invention provides a steel cylinder filling device and method for high-purity arsine. The steel cylinder filling device for the high-purity arsine is characterized by comprising a first pipeline, one end of the first pipeline is used for being connected with a source gas steel cylinder, the other end of the first pipeline is connected with the upper end of a cooling coil, the cooling coil is placed in a cooling tank, the lower end of the cooling coil is connected with one end of a second pipeline, the other end of the second pipeline is used for being connected with a to-be-filled steel cylinder, a main pipeline is formed by the first pipeline, the cooling coil and the second pipeline, the second pipeline is connected with a branch pipeline, the branch pipeline is connected with a cold trap collecting steel cylinder and a vacuum pump, and the branch pipeline is further connected with a high-purity helium source and an exhaust gas discharging outlet. The arsine is filled in a liquid state, a filling system is needed to be maintained cleaning in the filling process, and the quality of the arsine cannot be influenced by the pipelines and the steel cylinders.

Description

Technical field [0001] The invention relates to a high-purity arsine cylinder filling system, which belongs to the technical field of electronic special gas. Background technique [0002] Arsine (AsH 3 ) Is a very important electronic gas. As an n-type dopant, it plays a very critical role in epitaxy and ion implantation processes. At the same time, arsine is also an important raw material for the synthesis of compound semiconductor gallium arsenide (GaAs) and gallium arsenide phosphorous (GaAsP). Compound semiconductors are widely used in the manufacture of light emitting diodes (LEDs) and high-efficiency solar cells. [0003] Arsine (AsH 3 ) Synthesis cannot be achieved by simple elemental reactions, and is usually prepared by hydrolysis of metal arsenides. The yield depends on the nature of the metal elements in the arsenide and which decomposition agent is used. Usually the yield is between 14%-86%. [0004] At present, the purity of arsine used in the electronics industry is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F17C5/02F17C13/00
Inventor 汤剑波李东升曾庆腾
Owner SHANGHAI ZHENGFAN TECH
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