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Magnetic micro-displacement platform-type step planar mirror laser interferometer, calibration method, and measuring method

A flat mirror and interferometry technology, which is applied in the direction of measuring devices, instruments, and optical devices, can solve the problems of poor anti-environmental interference ability, and achieve the effect of improving accuracy and moving accuracy

Active Publication Date: 2015-09-23
CHENGDU UNIV OF INFORMATION TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a laser interferometer capable of resisting environmental interference in view of the shortcomings of current laser interferometers that are poor in anti-environmental interference

Method used

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  • Magnetic micro-displacement platform-type step planar mirror laser interferometer, calibration method, and measuring method
  • Magnetic micro-displacement platform-type step planar mirror laser interferometer, calibration method, and measuring method
  • Magnetic micro-displacement platform-type step planar mirror laser interferometer, calibration method, and measuring method

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Experimental program
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Effect test

Embodiment 1

[0051] Embodiment 1, as shown in the figure, a magnetic micro-displacement platform-type step plane mirror laser interferometer, including a laser source 1, a micro-moving step plane mirror 2, an interferometric photodetector group 4, and a moving plane mirror 3. The beam splitter group 5 and the magnetic micro-displacement platform 10, the micro-movement step plane reflector is arranged on the magnetic micro-displacement platform 10, the laser source 1 emits a z-beam laser beam to the beam splitter group 5, Where z is a positive integer greater than or equal to 2, the interferometric photodetector group 4 includes z interferometric photodetectors, each interferometric photodetector 41 corresponds to a laser beam, and the micro-motion The reflective surface of the stepped plane reflector 2 includes z reflective planes 21, and the z reflective planes 21 are arranged in a stepped manner. Each reflective plane 21 corresponds to a laser beam, and each laser beam passes through the ...

Embodiment 2

[0061] Embodiment 2: As shown in the figure, a calibration method for a magnetic micro-displacement platform-type stepped mirror laser interferometer includes the following steps:

[0062] Step 1. Position adjustment: Adjust the laser source 1, the micro-movement step plane mirror 2, the beam splitter group 5, the interferometric photodetector group 4, the reflection measurement photodetector group 6, the moving plane mirror 3 and the magnetic micro-displacement the location of platform 10;

[0063] Step 2. Adjusting the optical path: start the laser source 1, and further precisely adjust the fine-motion step plane reflector 2, the beam splitter group 5, the interferometric photodetector group 4, the reflection measurement photodetector group 6, and the moving plane reflector 3 and the position of the magnetic micro-displacement platform 10, so that the optical path of the laser interferometer meets the design requirements;

[0064]Step 3, generate the strongest interference ...

Embodiment 3

[0072] Implementation 3: As shown in the figure, a measurement method using a magnetic micro-displacement platform-type stepped mirror laser interferometer and a calibration method:

[0073] In the actual measurement environment, it is assumed that the signal reading measured by the calibration reflectance measurement photodetector 61a is x, the signal reading obtained by the calibration interferometric photodetector 41a is y, and the x value and the y value are at the strongest Comparisons are made in the interference database, the weakest interference database, and the 1 / n wavelength interference database. When the x value and y value match a certain set of values ​​in the strongest interference database, this position is considered to be the strongest constructive interference position , when the x value and y value match a set of values ​​in the weakest interference database, this position is considered as the weakest destructive interference position, when the x value and ...

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Abstract

The invention relates to the precision test technology and apparatus field, and especially relates to a magnetic micro-displacement platform-type step planar mirror laser interferometer, a calibration method, and a measuring method. The magnetic micro-displacement platform-type step planar mirror laser interferometer comprises a laser source, a micro-moving step planar mirror, an interference measuring photoelectric detector set, a mobile planar mirror, a spectroscope set, and a magnetic micro-displacement platform. The laser source emits z laser beams to the spectroscope set. The interferometer further includes a reflection measuring photoelectric detector set. The second laser beam set, when being emitted from the mobile planar mirror to the spectroscope set, also forms a reflection laser beam set. All laser beams of the reflection laser beam set are emitted to separate reflection measuring photoelectric detectors respectively. The laser interferometer can determine the interference state of laser interference light beams according to the intensity of the reflection laser beam set, therefore, the purpose of environment interference resistance can be achieved.

Description

technical field [0001] The invention relates to the field of precision testing technology and instruments, in particular to a magnetic micro-displacement platform-type stepped plane mirror laser interferometer, a calibration method and a measurement method. Background technique [0002] The emergence of lasers has enabled the rapid development of ancient interferometric technology. Lasers have the characteristics of high brightness, good directionality, monochromaticity and good coherence. Laser interferometry technology has been relatively mature. Laser interferometry system is widely used: measurement of precision length and angle, such as detection of linear scale, grating, gauge block, and precision screw; positioning detection system in precision instruments, such as control and correction of precision machinery; special purpose for large-scale integrated circuits Positioning detection systems in equipment and testing instruments; measurement of tiny dimensions, etc. A...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
Inventor 李享梅许诚昕张白
Owner CHENGDU UNIV OF INFORMATION TECH