Laser dual-axis differential confocal induced breakdown-Raman spectroscopy imaging detection method and device

A dual-axis differential confocal and laser-induced breakdown technology, which is applied in Raman scattering, material excitation analysis, etc., can solve the problem of limiting the improvement of spectral detection resolution, restricting the signal-to-noise ratio of the system, and insufficient spatial resolution of spectral detection. Advanced problems, to achieve the effect of improving the detection signal-to-noise ratio and spectral resolution, reducing spectral detection noise, and avoiding system stray light
CN104931481BActive Publication Date: 2017-08-25BEIJING INSTITUTE OF TECHNOLOGYGY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING INSTITUTE OF TECHNOLOGYGY
Publication Date
2017-08-25

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Abstract

The invention belongs to the field of spectral measurement and imaging technology, and relates to a laser biaxial differential confocal induced breakdown spectrum-Raman spectrum imaging detection method and device, which can be used for high spatial resolution imaging of micro-region components and morphological parameters of samples. and detection. The method and device use laser-induced breakdown spectroscopy to detect elemental composition information of sample components; use Raman spectroscopy to detect chemical bond and molecular structure information of the sample; use biaxial differential confocal technology to detect sample surface morphology information, biaxial difference The dynamic structure has the advantages of large field of view and large working distance, which can accurately focus the sample, ensure the smallest illumination spot, and improve spectral excitation efficiency; the combination of the three can achieve structural sharing and functional complementation, and realize the morphology and composition of the sample Comprehensive measurement of information. The invention has the advantages of high spatial resolution, rich material component information and controllable measurement focus spot size, and has broad application prospects in the fields of minerals, metallurgy, space detection, environmental monitoring, biomedicine and other fields.
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Description

technical field

[0001] The invention belongs to the field of spectral measurement and imaging technology, and relates to a laser dual-axis differential confocal induced breakdown-Raman spectral imaging detection method and device. The differential confocal imaging technology is combined with the spectral detection technology to form a The high-resolution spectral imaging and detection method and device of "map-spectrum integration" can be used for multi-spectral comprehensive testing and high-resolution imaging of micro-region morphological components of samples.

[0002] technical background

[0003] Laser Induced Breakdown Spectroscopy (LIBS for short) is an in-situ detection technology for material components, which uses high-power-density lasers to excite the sample surface to generate laser-induced plasma. The atomic and ion spectral lines in the sample can be used to determine the composition of the sample. Its outstanding advantage is that it can detect the composition...

Claims

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