Graphene field effect device manufacturing method
A graphene field and graphene technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve problems such as high doping and difficult intrinsic characteristics of graphene devices
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[0015] The invention provides a preparation method of a graphene field effect device. In this preparation method, through the improvement of substrate cleaning steps, metal electrode deposition steps, etc., the excellent intrinsic characteristics of graphene are kept as much as possible in the preparation process, and graphene with better performance than the existing technology can be prepared. Graphene Field Effect Devices.
[0016] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0017] In an exemplary embodiment of the present invention, a method for preparing a graphene field effect device is provided. figure 1 It is a flowchart of a method for preparing a graphene field effect device according to an embodiment of the present invention. Such as figure 1 As shown, the p...
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