Method of manufacturing member having relief structure, and member having relief structure manufactured thereby

Abstract

This method of manufacturing a member having a relief structure involves a step (S1) for preparing a stamp for microcontact printing, a step (S2) for preparing a pattern-forming material, a step (S3) for applying the pattern-forming material to raised portions of the microcontact printing stamp, a step (S4) for transferring the coated pattern forming material onto a substrate, a step (S5) for preparing a pattern-covering material, a step (S6) for coating the pattern-covering material onto the substrate, and a curing step (S7) for curing the pattern-forming material and the pattern-covering material. Thus, members having a relief pattern can be easily and efficiently manufactured.

Description

technical field [0001] The present invention relates to a method of manufacturing a member having a concavo-convex structure using a microcontact printing method. Background technique [0002] Lithography is known as a method for forming a fine pattern like a semiconductor integrated circuit. The resolution of an image formed by lithography is determined by the wavelength of the light source or the numerical aperture of the optical system. In order to meet the demand for miniaturized devices in recent years, light sources with shorter wavelengths are expected. However, short-wavelength light sources are expensive and difficult to develop, and it is also necessary to develop optical materials that transmit such short-wavelength light sources. In addition, when a large-area pattern is produced by the conventional lithography method, a large optical component is required, which is accompanied by technical and economical difficulties. Therefore, a novel method of forming a des...

AI Technical Summary

Problems solved by technology

However, the original plate for replicas made of metal is formed by electroforming or the like and is expensive, so it is not easy to mass-produce

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