Terahertz filter and manufacturing method thereof

A manufacturing method and filter technology, which can be applied to waveguide-type devices, electrical components, circuits, etc., can solve the problems of narrow filtering range of filters, adding terahertz filters, and poor scalability.

Active Publication Date: 2015-11-11
BEIJING JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the filtering range of the filter is still narrow, and the scalability is not strong, so it is difficult to apply to the actual terahertz system. Therefore, the urgent technical problem for those skilled in the art is how to expand the filtering range of the filter to increase Possibility of terahertz filter applied to the system

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  • Terahertz filter and manufacturing method thereof
  • Terahertz filter and manufacturing method thereof
  • Terahertz filter and manufacturing method thereof

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Embodiment 1

[0046] This embodiment provides a terahertz filter, and its specific implementation structure is as follows figure 1 , figure 2 , image 3 , Figure 4 shown, may include;

[0047] The polymer material layer 110 and the metal layer 120, wherein the polymer material layer is made of a flexible polymer material, for example, Parylene (parylene), PMMA (Polymethylmethacrylate, polymethyl methacrylate), PDMS (polydimethylsiloxane, polydimethylsiloxane) Silicone) and other polymer materials with excellent flexibility and light transmission, such as figure 2As shown, the metal layer 120 is a sheet structure 121 including horizontal bars 122 and vertical bars 123; the metal layer can be made of copper, aluminum, silver and other metal materials with low resistivity and good conductivity; the sheet structure is periodically distributed in within the polymeric material layer 110 .

[0048] In the specific implementation process of the embodiment of the present invention, in order ...

Embodiment 2

[0058] This embodiment provides a manufacturing process of the terahertz filter as in Embodiment 1 such as Figure 7 As shown, the following processing steps are included:

[0059] Step S701, prepare the sheet, use the double-thrown silicon wafer as the supporting substrate sheet 1 of flexible structure, grow a layer of silicon dioxide on the surface of the substrate as the insulating medium layer 2 by thermal oxidation, the thickness of this layer of silicon dioxide can be 300nm;

[0060] Step S702, deposit a polymer on the surface of the silicon wafer, the polymer is a flexible polymer material (such as Parylene, PMMA, PDMS and other polymer materials with excellent flexibility and light transmittance), with a thickness of 5 μm to 200 μm, forming the first layer polymeric material 111;

[0061] Step S703, the first layer of polymer material is used as the first substrate of the filter, after conventional cleaning, the photoresist 3 is applied, and the mask of the sheet str...

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Abstract

The embodiment of the invention provides a terahertz filter and a manufacturing method thereof. The terahertz filter comprises a polymeric material layer and a metal layer; the metal layer comprises sheet structures; each sheet structure comprises transverse strips and longitudinal strips; and the sheet structure is periodically distributed in the polymeric material layer. By means of the embodiment of the invention, the filter range of the filter is enlarged; and furthermore, the terahertz filter is applicable to other systems more easily.

Description

technical field [0001] The invention relates to the technical field of electromagnetic wave filtering, in particular to a terahertz filter and a manufacturing method thereof. Background technique [0002] Terahertz (THz) waves refer to electromagnetic waves with a frequency between 0.1 and 10 THz (corresponding to a wavelength of 30 μm to 3 mm), which is between visible light and microwaves. Terahertz waves have unique physical characteristics such as transient, low energy, and strong penetrability, making them have broad application prospects in broadband communications, object imaging, environmental monitoring, medical diagnosis, security inspection, and other fields. In practical applications, it is generally necessary to filter out electromagnetic waves and noise in unwanted frequency ranges in order to suppress environmental noise and improve the performance of terahertz waves. In order to solve this problem, terahertz filters are generally used to filter electromagnet...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01P1/20H01P11/00
Inventor 李修函徐征帅朱王强杨天阳许巍
Owner BEIJING JIAOTONG UNIV
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