A miniature single-circulation airflow type planar dual-axis pet angular velocity sensor

Abstract

The invention discloses a miniature single-circulation air-flow type planar dual-axis PET (polyethylene terephthalate) angular velocity sensor. The sensor comprises a single-circulation air-flowing type planar dual-axis angular velocity chip, a PCB (printed circuit board), a base, a casing, a buffered silicon sheet and lead wires, wherein the single-circulation air-flowing type planar dual-axis angular velocity chip comprises a PET cover plate, a silicon plate and a PET base; an air flow loop is arranged on the PET cover plate; two pairs of double-degree-of-freedom sensitive hot wires are arranged on the silicon plate; a piezoelectric ceramic oscillator and an air flow loop are arranged on the PET base. The air-flow type angular velocity sensor can resist high overload and high impact; the manufacturing cost is only 1 / 10 of that of an all-silicon structure; the angular velocities in two orthogonal directions, parallel to the surface of the angular velocity chip, of sensitive axes can be measured simultaneously, the sensitivity consistency of angular velocity signals in two directions is good, acquisition and control of the angular velocity signals are facilitated, and the practicability is high.

Description

technical field [0001] The invention relates to the technical field of detecting angular velocity and posture parameters of a moving body by using the principle of Coriolis force, in particular to a miniature single-circulation airflow type plane biaxial PET angular velocity sensor. Stabilization systems for micro-carriers such as drones, wearable devices, helmets, smart robots, cameras, etc. Background technique [0002] In the prior art, the micro angular velocity sensor represented by the micromechanical vibration angular velocity sensor is generally equipped with a solid frame or beam in the angular velocity chip, which has poor shock and vibration resistance, while the airflow angular velocity sensor uses gas as the sensitive mass and has a simple structure. The angular velocity sensor can be used to deflect the airflow sensitive body to realize the measurement of angular parameters. Therefore, this miniature angular velocity sensor is resistant to high overload, strong...

AI Technical Summary

Problems solved by technology

The high-sensitivity piezoelectric jet angular velocity sensor proposed in Chinese patent 89105999.7 is composed of a housing of a sensitive device, a nozzle body, a sensitive element, a piezoelectric pump, a pump seat, a disc spring, a lock nut, an external circuit system, and a mechanical system. The sensitive element of a one-dimensional angular velocity sensor is made by traditional machining with materials such as copper, aluminum or stainless steel. The sensitive element has a large volume and high power, and cannot be used in the field of micro-carrier attitude measurement and control; its hot wire is manually welded, which is very difficult. It is difficult to ensure the parallelism and perpendicularity of the hot wires, so the cross-coupling is large, the consistency is poor, it is difficult to mass-produce, and the cost is high; it can only be sensitive to the angular velocity in one direction. The error caused by the distance is large

In the prior art, the MEMS process is used to etch the air flow network in the silicon wafer, but the process is complicated, the cost is high, and it is difficult to meet the design requirements; the size of the air flow network is usually less than half of the thickness of the silicon wafer, and because the thickness of the silicon wafer is thin, it is only 300 μm Therefore, the scale of the airflow network is small, the gas capacity is small, the inertia it receives is small at the same angular velocity input, the deflection of the airflow beam is small, and the sensitivity of the angular velocity sensor is small; the effective deformation area of ​​the piezoelectric pump vibrator and the cross-sectional area of ​​the airflow network Consistent area, small size, weak ability to drive gas flow, small air velocity, low angular velocity sensor sensitivity

In addition, in the prior art, the airflow network fabricated on the silicon wafer is generally open, and the opening and inlet are the same as those of the outside world, which is easily affected by the external environment, and the stability of the angular velocity sensor is poor. Although the cost is low, the applicable conditions are harsh and practical. Not strong

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