Small-caliber and variable-aperture grid assembly

A variable aperture and grid technology, applied to electrical components, discharge tubes, circuits, etc., can solve problems such as shortened lifespan, achieve the effects of improving lifespan, improving uniformity and stability, and prolonging lifespan

Inactive Publication Date: 2015-11-25
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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  • Abstract
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Problems solved by technology

Affected by the plasma distribution in the discharge chamber of the ion thruster, the beam current drawn by the grid assembly has a high density in the central area and a small edge area, so that the density of exchanged charge ions generated in the central area is high and the edge area is small , so that the exchange charge ions bombard and sputter the central area of ​​the accelerating grid seriously, and the edge area is lighter, resulting in shortened life of the accelerating grid due to the concentration of ion bombardment and sputtering in the central area

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  • Small-caliber and variable-aperture grid assembly

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Embodiment Construction

[0010] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0011] In view of the problems raised by the background technology, if the density of the extracted beam current in the center area of ​​the grid assembly is reduced and the density of the extracted beam current in the edge area is increased, the bombardment and sputtering of the exchanged charge ions to the central area of ​​the accelerating grid can be reduced, solving the problem of Ions are too concentrated on the bombardment and sputtering of the central area of ​​the accelerating grid, so as to achieve the purpose of prolonging its life. Therefore, reducing the extracted beam current density in the central area of ​​the grid assembly and increasing the extracted beam current density in the edge area is one of the effective ways to prolong the life of the grid assembly.

[0012] Therefore, the present invention designs a variable aperture grid assembl...

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Abstract

The invention discloses a small-caliber and variable-aperture grid assembly. The target of prolonging the service life of an ion thruster is achieved by improving the beam extraction uniformity and prolonging the service life of the grid assembly. An accelerating grid in the grid assembly is uniform in diameter; an opening region of a screen grid is divided into a plurality of regions with different pore diameters; the pore diameters are sequentially increased progressively from small to large from the center region to the edge region, so that the beam extraction in the center region is suppressed and reduced; and the beam in the edge region is increased to improve the beam uniformity. Due to the reduction of the beam in the center region, charge exchange ions in the region can be effectively reduced, so that sputtering corrosion to the region of the grid assembly caused by the charge exchange ions is reduced, and the service life of the grid assembly is prolonged.

Description

technical field [0001] The invention relates to the design and manufacturing technology of an ion thruster, and the ion source design and manufacturing technology of an ion etching machine equipment, and specifically designs a grid assembly for an ion thruster. Background technique [0002] The grid assembly of the ion thruster is composed of an accelerating grid and a screen grid connected through an insulator, and its function is to extract and accelerate beam ions (abbreviated as beam) to form a thrust. Affected by the plasma distribution in the discharge chamber of the ion thruster, the beam current drawn by the grid assembly has a high density in the central area and a small edge area, so that the density of exchanged charge ions generated in the central area is high and the edge area is small , so that the exchanged charge ions bombard and sputter the central area of ​​the accelerating grid seriously, and the edge area is lighter, resulting in shortening the life of th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/32
Inventor 郑茂繁张天平杨福全耿海黄永杰孙运奎
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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