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A comparative anti-jamming micro-moving stepped mirror laser interferometer, calibration method and measurement method

A technology of flat mirrors and laser interferometers, which is applied to measuring devices, instruments, and optical devices, and can solve problems such as poor ability to resist environmental interference

Active Publication Date: 2017-11-10
扬州相禾凌电力科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a laser interferometer capable of resisting environmental interference in view of the shortcomings of current laser interferometers that are poor in anti-environmental interference

Method used

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  • A comparative anti-jamming micro-moving stepped mirror laser interferometer, calibration method and measurement method
  • A comparative anti-jamming micro-moving stepped mirror laser interferometer, calibration method and measurement method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] Embodiment 1, as shown in the figure, a comparative anti-interference laser interferometer with micro-movement stepped mirror, including a laser source 1, a micro-moved stepped mirror 2, an interferometric photodetector group 4, and a moving plane reflector Mirror 3, beam splitter group 5 and micro-motion platform 10, the micro-movement step plane reflector is arranged on the micro-motion platform 10, the laser source 1 emits a z beam of laser beams to the beam splitter group 5, wherein z is a positive integer greater than or equal to 2, the interferometric photodetector group 4 includes z interferometric photodetectors, each interferometric photodetector 41 corresponds to a laser beam, and the micro-movement steps The reflective surface of the plane mirror 2 includes z reflective planes 21, and the z reflective planes 21 are arranged in a stepped manner. Each reflective plane 21 corresponds to a laser beam, and each laser beam passes through the beam splitter group 5 A...

Embodiment 2

[0050] Embodiment 2: As shown in the figure, a calibration method for a contrastive anti-interference micro-moving step mirror laser interferometer includes the following steps:

[0051] Step 1. Position adjustment: adjust the laser source 1, the micro-movement step plane mirror 2, the beam splitter group 5, the interferometric photodetector group 4, the reflection measurement photodetector group 6, the moving plane mirror 3 and the micro-motion platform 10 position;

[0052] Step 2. Adjusting the optical path: start the laser source 1, and further precisely adjust the fine-motion step plane reflector 2, the beam splitter group 5, the interferometric photodetector group 4, the reflection measurement photodetector group 6, and the moving plane reflector 3 and the position of the micro-movement platform 10, so that the optical path of the laser interferometer meets the design requirements;

[0053]Step 3, generate the strongest interference database: select an interferometric p...

Embodiment 3

[0061] Implementation 3: As shown in the figure, a measurement method using a comparative anti-interference micro-moving step mirror laser interferometer and a calibration method:

[0062] In the actual measurement environment, it is assumed that the signal reading measured by the calibration reflectance measurement photodetector 61a is x, the signal reading obtained by the calibration interferometric photodetector 41a is y, and the x value and the y value are at the strongest Comparisons are made in the interference database, the weakest interference database, and the 1 / n wavelength interference database. When the x value and y value match a certain set of values ​​in the strongest interference database, this position is considered to be the strongest constructive interference position , when the x value and y value match a set of values ​​in the weakest interference database, this position is considered as the weakest destructive interference position, when the x value and y ...

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Abstract

The invention relates to the field of precision testing technology and instruments, in particular to a laser interferometer of a contrasting anti-interference micro-movement step plane mirror and a calibration method and a measurement method. The instrument comprises a laser source, a micro-movable step plane mirror, an interferometric photodetector group, a moving plane mirror, a spectroscopic mirror group and a micro-movable platform, and the laser source emits a z-beam laser beam to the spectroscopic mirror group, It also includes a reflective measurement photodetector group, and the second laser beam group also forms a reflected laser beam group after being irradiated to the beam splitter group by the moving plane mirror, and each laser beam of the reflected laser beam group The beams are respectively directed to one of said reflection measurement photodetectors. The laser interferometer of the present application determines the interference state of the laser interference beam according to the intensity of the reflected laser beam group, so as to achieve the purpose of anti-environmental interference.

Description

technical field [0001] The invention relates to the field of precision testing technology and instruments, in particular to a contrasting anti-interference micro-movement step mirror laser interferometer, a calibration method and a measurement method. Background technique [0002] The emergence of lasers has enabled the rapid development of ancient interferometric technology. Lasers have the characteristics of high brightness, good directionality, monochromaticity and good coherence. Laser interferometry technology has been relatively mature. Laser interferometry system is widely used: measurement of precision length and angle, such as detection of linear scale, grating, gauge block, and precision screw; positioning detection system in precision instruments, such as control and correction of precision machinery; special purpose for large-scale integrated circuits Positioning detection systems in equipment and testing instruments; measurement of tiny dimensions, etc. At pres...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02
Inventor 张白
Owner 扬州相禾凌电力科技有限公司