Method for multi-board card to synchronically and sequentially read multi-path sensor data

Abstract

The invention discloses a method for a multi-board card to synchronically and sequentially read multi-path sensor data, belonging to the signal collection of the semiconductor manufacture device and the data communication technology field. The method disclosed by the invention comprises steps of endowing data with various address codes and storing the data in RAM, transmitting a data reading request for every 200 us by a DSP module, setting the data locking signal high on a VME bus by a raster data address code transmission module subprogram or a laser interferometer data address code transmission module subprogram , transmitting an address code to be read by the raster data address code transmission module subprogram or the laser interferometer data address transmission module subprogram, reading and writing the data into the RAM, 6 repeatedly executing the step 4 and 5 and sequentially reading data of all paths, and 7 transmitting data inside the RAM to the DSP module. The changing right of the address line and the signal line can only be owned by the main card, so that the bus competition among the multiple cards will not happen. The data reading by the card is trigger through changing of the address line, which guarantees the synchronism of data reading.

Description

technical field [0001] The invention belongs to the technical field of signal acquisition and data communication of semiconductor manufacturing equipment. Background technique [0002] As an integrated chip manufacturing equipment, the lithography machine needs to achieve extremely high measurement accuracy and control accuracy. In the measurement device, the grating and laser interferometer are the core measurement components. The measurement accuracy of the grating can reach the micron level, while the laser interferometer is can reach the nanoscale. There are many macro-micro coordinated control schemes in the lithography system. Usually, the grating is used as the measuring element of the macro-motion system, and the laser interferometer is used in the micro-motion system that requires higher precision. When performing macro-micro control, Multiple motion control cards are required, and each card needs to obtain the data of the grating and laser interferometer to the co...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a method for multi-board synchronously reading multi-channel sensor data in order to solve the problem that the current technology cannot read the data of two sets of sensors of laser interferometer and grating at the same time, while multi-board reading VME bus data the problem of competition

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