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Method for multi-board card to synchronically and sequentially read multi-path sensor data

A multi-channel sensor and sequential reading technology, which is applied in the direction of instruments, simulators, program control, etc., can solve the problem that the data of laser interferometer and grating sensor cannot be read at the same time

Inactive Publication Date: 2015-12-09
HARBIN INST OF TECH
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Problems solved by technology

[0003] The purpose of the present invention is to provide a method for multi-board synchronously reading multi-channel sensor data in order to solve the problem that the current technology cannot read the data of two sets of sensors of laser interferometer and grating at the same time, while multi-board reading VME bus data the problem of competition

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  • Method for multi-board card to synchronically and sequentially read multi-path sensor data

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specific Embodiment approach 1

[0014] Specific implementation mode one: combine figure 1 Shown, illustrate the technical scheme of this embodiment, its method step is:

[0015] Step 1: The master card 1 of the motion control card, the slave card 2 of multiple motion control cards, the multi-channel laser interferometer data acquisition card 3 and the multi-channel grating data acquisition card 4 are all connected to the VME bus 7; The laser interferometer data acquisition card 3 updates the collected data from multiple laser interferometers 5 at a frequency of 10 MHz, and assigns these data to different address codes and stores them in the RAM of the multi-channel laser interferometer data acquisition card 3 The multi-channel grating data acquisition card 4 updates the data collected by a plurality of grating sensors 6 at a frequency of 10MHz, and stores these data in the RAM of the multi-channel grating data acquisition card 4 after giving different address codes;

[0016] Step 2: The DSP module in the ma...

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Abstract

The invention discloses a method for a multi-board card to synchronically and sequentially read multi-path sensor data, belonging to the signal collection of the semiconductor manufacture device and the data communication technology field. The method disclosed by the invention comprises steps of endowing data with various address codes and storing the data in RAM, transmitting a data reading request for every 200 us by a DSP module, setting the data locking signal high on a VME bus by a raster data address code transmission module subprogram or a laser interferometer data address code transmission module subprogram , transmitting an address code to be read by the raster data address code transmission module subprogram or the laser interferometer data address transmission module subprogram, reading and writing the data into the RAM, 6 repeatedly executing the step 4 and 5 and sequentially reading data of all paths, and 7 transmitting data inside the RAM to the DSP module. The changing right of the address line and the signal line can only be owned by the main card, so that the bus competition among the multiple cards will not happen. The data reading by the card is trigger through changing of the address line, which guarantees the synchronism of data reading.

Description

technical field [0001] The invention belongs to the technical field of signal acquisition and data communication of semiconductor manufacturing equipment. Background technique [0002] As an integrated chip manufacturing equipment, the lithography machine needs to achieve extremely high measurement accuracy and control accuracy. In the measurement device, the grating and laser interferometer are the core measurement components. The measurement accuracy of the grating can reach the micron level, while the laser interferometer is can reach the nanoscale. There are many macro-micro coordinated control schemes in the lithography system. Usually, the grating is used as the measuring element of the macro-motion system, and the laser interferometer is used in the micro-motion system that requires higher precision. When performing macro-micro control, Multiple motion control cards are required, and each card needs to obtain the data of the grating and laser interferometer to the co...

Claims

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Application Information

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IPC IPC(8): G05B19/042
CPCG05B19/0421
Inventor 陈兴林刘洋王一光宋法质陈震宇何良辰张常江宋跃
Owner HARBIN INST OF TECH
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