Electromagnetic type MEMS (micro-electro-mechanical system) vibration energy collector and preparation method therefor

Abstract

The invention discloses an electromagnetic type MEMS (micro-electro-mechanical system) vibration energy collector and a preparation method therefor. Concave grooves and respective inductance wire layers are formed in two substrates respectively; the two substrates are combined to form a cavity for accommodating a movable permanent magnet by the concave grooves, and the respective inductance wires are connected in a bridging manner to form spiral inductance. In a vibration environment, a vibration pick-up structure of the electromagnetic type energy collector can freely move in the cavity, and the vibration pick-up structure is a non-resonance type vibration pick-up structure; compared with the resonance type vibration pick-up structure of the conventional energy electromagnetic type collector, the influence on the movement conditions from the environment vibration frequency of the electromagnetic type MEMS vibration energy collector is low, and the MEMS vibration energy collector can response to environment vibrations in different directions. No matter how the vibration frequencies and the vibration directions change, the electromagnetic type MEMS vibration energy collector can effectively collect vibration energy and convert the vibration energy into electric energy, therefore, the electromagnetic type MEMS vibration energy collector has the advantages of high energy collecting efficiency, low manufacturing cost and high consistency.

Description

technical field [0001] The invention relates to an energy harvester for collecting vibration energy in the environment and a preparation method thereof, in particular to an electromagnetic vibration energy harvester based on MEMS (Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) technology and a preparation method thereof. Background technique [0002] The Internet of Things has broad application prospects in the fields of intelligent transportation, medical health, environmental monitoring, public security, national defense and military affairs. my country has vigorously promoted the Internet of Things as a strategic industry. The Internet of Things includes many wireless sensor nodes with the same or different functions, and the nodes communicate with each other and work together. Micro-energy technology is responsible for providing power to sensor nodes and is one of the key technologies for the development of the Internet of Things. At present, micro en...

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Problems solved by technology

In order to improve the efficiency of energy collection, the electromagnetic energy harvester is required to work in a resonance state, that is, the natural frequency of the vibration pickup structure in the collector is consistent with the vibration frequency in the external environment, but the vibration in the environment has many and variable frequency components ( frequency bandwidth), therefore, it is difficult for the energy harvester to work in a resonant state in practice, and its energy collection efficiency is low; in addition, electromagnetic energy harvesters can often only collect vibration energy in a single direction, when working in the vibration direction In a randomly changing environment, the vibration energy it can collect is very limited, which further limits its energy collection efficiency

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