Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet

Abstract

The invention discloses an air-floatation supporting device for actively regulating and controlling the air pressure of a throttling hole inlet. The air-floatation supporting device comprises an air-floatation supporting body, an active air-pressure regulating unit, a supporting body detecting unit and a driving control unit, wherein an air inlet hole, a throttling hole and a regulating unit mounting hole are formed in the air-floatation supporting body; an air inlet valve and an air outlet valve are arranged at the air inlet of the air inlet hole and the air outlet of the throttling hole respectively; a regulating cavity is formed between the active air-pressure regulating unit and the air-floatation supporting body; the supporting body detecting unit is used for real-time detection of the speed and acceleration of up-and-down motion of the air-floatation supporting body and / or the distance of the air-floatation supporting body relative to an air-floatation guide rail below the air-floatation supporting body; and the driving control unit is used for performing filtering, amplification and data processing of signals detected by a detecting device to generate driving signals to drive the active air-pressure regulating unit to deform to change the volume of the regulating cavity. The air-floatation supporting device can effectively inhibit micro-vibration of air-floatation supporting and meanwhile has the characteristics of compact structure, convenience in control and high precision.

Description

technical field [0001] The invention belongs to the field of air-floating support devices, and more specifically relates to an air-floating support device that actively regulates the air pressure at the inlet of an orifice. Background technique [0002] The air bearing device is mainly used in ultra-precision processing equipment to support precision moving parts. Compared with the traditional mechanical contact guide rail support, there is no direct contact between the moving parts of the air bearing and the support, which avoids contact friction during the movement, and the movement accuracy can be greatly improved. Therefore, in ultra-precision machining and electronic manufacturing , precision measurement, zero-gravity simulation and other fields, the air flotation support device has been widely used. [0003] The basic form of the air bearing device is that compressed air flows into the gap between the moving part and the supporting part after passing through a small h...

AI Technical Summary

Problems solved by technology

[0004] Various methods for improving the bearing capacity and stiffness of air bearings have been proposed in the prior art, such as improving the structural shape and size of the orifice and pressure chamber of the air bearing, but this type of passive air bearing The bearing capacity and rigidity of the device per unit area are limited, thus restricting the application of relatively heavy loads in precision machining or high-speed spindles; Active air bearings with area or orifice length, this kind of scheme is only good for adjusting the damping characteristics of air bearings, but the change of pressure is very limited, so the adjustment effect on support force and stiffness is also relatively limited

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