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Preparing method for micron-order particle sample for transmission electron microscope (TEM)

An electron microscope, micron-level technology, applied in the preparation of test samples, etc., can solve the problems of complex sample preparation methods, low sample preparation success rate, complicated process, etc., to achieve mature sample preparation equipment and technology, and successful sample preparation The effect of high efficiency and simple operation process

Inactive Publication Date: 2015-12-30
PEKING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This sample preparation method is relatively complicated, and holes are often formed due to air bubbles during the sample embedding process in the copper tube, which will affect the subsequent ion thinning and lead to sample preparation failure.
In addition, ultra-thin sectioning method can also be selected, but for hard micron-sized particle samples, ultra-thin sectioning often introduces stress and affects TEM observation
Therefore, the existing process for preparing micron-sized particle TEM samples is complicated, and the success rate of sample preparation is low.

Method used

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  • Preparing method for micron-order particle sample for transmission electron microscope (TEM)
  • Preparing method for micron-order particle sample for transmission electron microscope (TEM)
  • Preparing method for micron-order particle sample for transmission electron microscope (TEM)

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Embodiment Construction

[0025] The present invention will be further described through the embodiments below in conjunction with the accompanying drawings.

[0026] The preparation method of the micron-scale particle transmission electron microscope sample of the present embodiment, such as figure 1 shown, including the following steps:

[0027] 1) Prepare grooves for curing samples:

[0028] Process a groove for solidifying the sample on the flat plate, the flat plate adopts a polytetrafluoroethylene plate, the diameter of the groove is 10mm, and the depth is 2mm, for standby;

[0029] 2) Curing treatment of micron particle samples:

[0030] Mix the micron-sized carbon particle sample to be tested evenly in the G-1 epoxy resin curing glue, then fill it into the groove in step 1), and then put it on the heating table, and heat and cure it at 130°C for 2 hours , cooled to room temperature after solidification, and taken out from the groove to obtain a solidified disc-shaped block sample with a diam...

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Abstract

The invention discloses a preparing method for a micron-order particle sample for a TEM. The preparing method includes the steps that a groove is formed in a flat plate and then filled with curing adhesive mixed with micron-order particle sample bodies, the mixture is heated, cured, cooled and then taken out, and a sheet-shaped block sample is obtained; the two surfaces of the sheet-shaped block sample are manually grinded and polished on a sample support, and a sample sheet is obtained; then supporting rings are bound through curing and binding agents, heating is carried out, the sample support is removed, and meanwhile the supporting rings are cured and bound to the sample sheet; the sample is finished, ion thinning is finally carried out, and the micron-order particle sample for the TEM is obtained. According to the preparing method, an operation technology is simple, adopted sampling devices and adopted sampling technologies are mature, the sampling success rate is high, practicability is high, and the preparing method is suitable for preparing various micron-order particle samples.

Description

technical field [0001] The invention relates to electron microscope sample preparation technology, in particular to a method for preparing micron-sized particle transmission electron microscope samples. Background technique [0002] Transmission electron microscope (TEM) uses the electron beam imaging that penetrates the sample, and can provide information on the microstructure, structure, composition and other aspects of the material with the resolution of the atomic scale. field has been increasingly widely used. Due to the relatively low penetrability of electron beams, TEM requires the sample to be "transparent" to electron beams. Usually, the thickness of the observation area of ​​the sample should be controlled below 100nm, which brings certain difficulties to the preparation of TEM samples. [0003] There are many methods of sample preparation for TEM, depending mainly on the type of material and the information to be obtained. For nanoscale particle materials, the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N1/28G01N1/32
Inventor 马秀梅尤力平徐军
Owner PEKING UNIV
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