Lifting and positioning device for vacuum chamber optical components

Abstract

A vacuum chamber optical element lifting and positioning device is characterized in that the vacuum chamber optical element lifting and positioning device comprises a frame body, a motor, a tray, a lead screw and a guide mechanism; the frame body comprises at least two stand plates and a top plate arranged on the stand plates; the power output end of the motor is connected with a worm; the tray comprises at least two longitudinal beams and a beam arranged between the longitudinal beams; each longitudinal beam is provided with a first positioning ball with the upward end face; the beam is provided with a second positioning ball with the upward end face as well; in addition, the two first positioning balls and the second positioning ball are not located on a straight line and can repeatedly position optical elements; the lead screw is vertically arranged on the beam of the tray; a rotating nut in rotation fit with the lead screw is arranged at the upper end of the lead screw; and worm teeth in rotation fit with the worm are arranged on the outer wall of the rotating nut. Compared with the prior art, the vacuum chamber optical element lifting and positioning device has the beneficial effects that the overall structure is simple, use is convenient, control is accurate, and the lifting distance can be easily regulated; and an accurate three-point positioning mechanism is arranged so that the repeated positioning error can be small.

Description

technical field [0001] The invention relates to a lifting and positioning device, which is applied to the ion beam trimming and polishing process of aspherical optical lenses in a vacuum environment. Background technique [0002] With the rapid development of science and technology, strong laser optical systems and high-definition optical systems, such as tactical laser weapon optical systems, long-distance ultraviolet and infrared imaging detection systems, deep space photoelectric detection systems, lightweight image stabilization and sighting systems, laser For radar systems, deep ultraviolet and extreme ultraviolet lithography systems, etc., the demand for optical components with sub-nanometer surface roughness and nanometer surface precision is increasingly urgent, and ultra-precision optical components and their manufacturing technologies are needed to achieve. The requirements for the development of advanced optoelectronic systems are increasing, and the precision and...

AI Technical Summary

Problems solved by technology

[0006] ① To increase the trolley device for conveying workpieces, the wires that provide power for the motor need to move with the conveying trolley, and wire protection devices are required; there will be a passing space for the conveying trolley to enter the process vacuum chamber from the vacuum chamber of the transfer chamber, and the transfer window will be increased The geometric size will prolong the time for the vacuum system to meet the process requirements and cause energy waste

[0007] ②The structure of the four-linkage is complex, and the lifting distance is a constant value once the design is completed. It is not possible to choose a range according to the process requirements and different workpieces, which is relatively limited.

[0008] ③Poor positioning repeatability of optical components, large repeat positioning error

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