An On-Chip Integrated Differential Inductor With Adjustable Inductance
A technology of differential inductance and inductance value, applied in circuits, electrical components, electrical solid devices, etc.
Active Publication Date: 2018-04-03
WENZHOU UNIVERSITY
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[0006] The present invention aims at the problem that the inductance value of the current on-chip differential inductor cannot be adjusted or that a non-standard CMOS process must be used to design a differential inductance with an adjustable inductance value, and proposes an on-chip differential inductance with adjustable inductance value based on a multilayer coplanar waveguide. Change the inductance value of the differential inductor by changing the control voltage of the on-chip CMOS switch, thereby increasing the adjustable range of the inductance value
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[0020] Below in conjunction with accompanying drawing and embodiment the present invention is described in further detail:
[0021] figure 1 100 is the matrix material, 101 is the bottom metal (metal layer one), 102 is the metal layer two, 103 is the metal layer three, 104 is the metal layer four, 105 is the metal layer five, 106 is the metal layer six; 107 is the metal layer The contact layer between layer 1 and the substrate, 108 is the via hole 1 between the metal layer 1 and the metal layer 2, 109 is the via hole 2 between the metal layer 2 and the metal layer 3, and 110 is the metal layer 3 and the metal layer The third via hole between four, 111 is the fourth via hole between the fourth metal layer and the fifth metal layer, and 112 is the fifth via hole between the fifth metal layer and the sixth metal layer.
[0022] figure 2 104 and 127 are respectively the multilayer coplanar waveguides, which are connected from the top metal layer to the bottom metal layer (metal...
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The invention discloses an on-chip integrated differential inductor with adjustable inductance value. It adopts a multi-layer coplanar waveguide structure, and there are 4 pairs of top-layer metal connection lines between two differential signal lines. CMOS switch. The present invention adopts the above-mentioned structure to control the connection state of the CMOS switch by changing the voltage loaded on the gate of the CMOS switch on the chip, change the connection position of the differential signal line, and realize the adjustable inductance value, thereby adjusting the performance of the millimeter wave chip. Therefore, the disadvantage that the differential inductance of the standard CMOS process cannot change the inductance value can be overcome, and the yield rate of the chip can be increased.
Description
technical field [0001] The invention relates to an on-chip integrated differential inductor, in particular to a differential inductor with adjustable inductance value. Background technique [0002] Inductance is one of the key components of millimeter-wave integrated circuits. Due to the existence of various parasitic inductances and parasitic capacitances in millimeter-wave integrated circuits, after tape-out, the test results of the circuit may have a large deviation from the simulation results, and even cause the chip to malfunction. Work. However, the inductance value of commonly used on-chip spiral inductors and on-chip coplanar waveguide inductors cannot be adjusted. Therefore, designing an on-chip inductor with adjustable inductance after tape-out can adjust the performance of the chip according to needs, thereby improving the yield rate of the chip. [0003] The differential model consists of two signals of equal magnitude and opposite phase. The advantage of the d...
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IPC IPC(8): H01L23/64H01L27/02
Inventor 刘桂潘跃晓
Owner WENZHOU UNIVERSITY