Method for increasing laser-damaged threshold through ion beam elastic domain etching
A laser damage threshold, ion beam technology, applied in the direction of cleaning methods using tools, cleaning methods using liquids, chemical instruments and methods, etc., to avoid surface scratches and improve the ability to resist laser damage.
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[0030] The non-water-based magnetorheology is used to polish the KDP crystal, and the polished crystal surface is etched and polished by ion beam elastic domain. The specific polishing process is as follows:
[0031] Step 1: Polishing the KDP crystal on the magnetorheological machine tool; magnetorheological polishing of the KDP crystal is already a very mature technology in the field, and will not be repeated here.
[0032] Step 2, remove the polished KDP crystal and quickly put it into a dry air shower with dry air;
[0033] Step 3, drop a small amount of xylene on the KDP crystal with a dropper, and soak the entire surface in xylene. After about 10 seconds, use the lens cleaning paper to lightly brush the surface of the crystal. Note that the lens cleaning paper cannot be reused. The surface of the lens cleaning paper is stained with iron powder, and it is easy to scratch the crystal surface after repeated use; the concentration of xylene is above 99.3%.
[0034] Step 4, p...
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