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Impact-free rectangular plate piezoelectric micro-motor

A plate piezoelectric and micro-motor technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc. Shock and other problems, to achieve the effect of solving the problem of driving stability, large output torque and eliminating shock

Active Publication Date: 2016-03-16
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this type of motor also has insurmountable problems, that is, due to its standing wave drive mode, it has an impact on the driven guide rail during operation. In some occasions, such as in electron beam and ion beam exposure equipment, the shaking caused by this impact It will have a great impact on the stable operation of the equipment
The large impact force of this standing wave motor often interferes with the working state of the driven parts

Method used

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  • Impact-free rectangular plate piezoelectric micro-motor
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  • Impact-free rectangular plate piezoelectric micro-motor

Examples

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Embodiment Construction

[0041] In a preferred embodiment of the present invention, a piezoelectric micromotor with a rectangular plate without impact is provided, such as figure 1 and 7 As shown, it includes a stator 110 , a first rotor 121 , a second rotor 122 , an output shaft 130 , a fastener 140 , a first pre-tension mechanism 151 and a second pre-tension mechanism 152 .

[0042] The stator 110 includes a substrate with a through hole, and the surface of the through hole serves as the driving surface of the micromotor. In this embodiment, the substrate is a rectangular metal plate 10, such as figure 2 shown. It has two surfaces (due to the width of the four surfaces extending in its thickness direction, that is, the thickness of the metal plate 10, is small, the four surfaces are not considered here), one is figure 2 The first surface visible in the paper facing the paper, the other is figure 2 The invisible second surface facing away from the paper. The center of the metal plate 10 has a...

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Abstract

The invention discloses an impact-free rectangular plate piezoelectric micro-motor. The impact-free rectangular plate piezoelectric micro-motor comprises a stator and a rotor, wherein the stator is a rectangular base plate which has at least two piezoelectric sheets on the surface thereof; a through hole surrounding the rotor is formed in the rectangular base plate; an excitation signal used for driving the impact-free rectangular plate piezoelectric micro-motor is uploaded between the rectangular base plate and the surfaces of the piezoelectric sheets which are disconnected with the rectangular base plate; and the excitation signal enables compound vibration of first-order longitudinal vibration and second-order bending vibration generated by the stator to form traveling waves on the surface of the through hole, so that the surface of the through hole can drive rotation of the rotor through a friction force. According to the impact-free rectangular plate piezoelectric micro-motor, as second-order travelling waves are excited on a driving surface by utilizing the longitudinal and bending compound mode of the base plate and the rotation of the rotor is driven by utilizing friction, the impact force is removed. The impact-free rectangular plate piezoelectric micro-motor can work steadily, so that an effect of steady driving is obtained.

Description

technical field [0001] The invention relates to a piezoelectric micromotor, in particular to a piezoelectric micromotor with a rectangular plate without impact. Background technique [0002] Piezoelectric micromotors use the inverse piezoelectric effect of piezoelectric ceramics to convert electrical energy into vibration energy of the stator, and the stator then drives the rotor to rotate or the moving parts to make linear or rotary motion through friction. When it works in the ultrasonic frequency band, it is also called an ultrasonic motor. [0003] Piezo motors have many features and advantages over conventional electromagnetic drives, such as: [0004] 1. Compact structure, high energy density (torque / mass), easy to miniaturize; [0005] 2. Low speed and high torque, without gear reduction mechanism, can realize direct drive; [0006] 3. The motor responds quickly, and can realize power-off self-locking; [0007] 4. Good position and speed control, high displacement...

Claims

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Application Information

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IPC IPC(8): H02N2/12H02N2/16
CPCH02N2/12H02N2/163
Inventor 鹿存跃黄整章李冲马艺馨
Owner SHANGHAI JIAO TONG UNIV
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