Device for detecting aspheric surface shape by splicing interference of deformable mirrors

Abstract

The device for splicing and interfering detecting aspheric surface shapes using deformable mirrors belongs to the technical field of optical detection. The present invention includes an interference detection system, a deforming mirror compensation system, a mechanical adjustment mechanism and a computer data processing module; specifically, it includes the following steps: Step 1: Build an application Stitching interference detection device for deformable mirrors; Step 2: Divide the sub-aperture; Step 3: Move to the position of the sub-aperture to be detected, and adjust the surface shape or refractive index of the deformable mirror according to the modeling and interference fringes; Step 4: Acquisition and processing of the sub-aperture interferogram ; Step five, sub-aperture backhaul error correction; Step six, full-aperture surface splicing. The present invention combines the deformable mirror with the sub-aperture splicing interference detection method, which can effectively reduce the number of sub-apertures required to cover the full aperture, increase the effective area of ​​each sub-aperture and the overlapping area, and solve the problem of affecting the splicing accuracy due to the small overlapping area problem.

Description

technical field [0001] The invention belongs to the technical field of optical detection, and in particular relates to a device for detecting an aspheric surface shape by splicing and interfering deformable mirrors. Background technique [0002] Interference detection technology is a commonly used surface shape detection technology, which is the relative detection of the surface to be measured and the reference surface. The reference surfaces are generally flat or spherical, and there will not be more interference fringes when using them to test the polished plane and spherical surface, while using spherical reference surfaces to detect aspheric surfaces, when the slope of the aspheric surface is larger, the density of interference fringes is also higher. many. When the interference fringe density exceeds the Nyquist frequency of the interferometer detector, the interference fringe cannot be resolved by the detector, resulting in the aspheric surface being unable to be meas...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to propose a device for detecting aspheric surface shapes by splicing and interfering deformable mirrors, so as to solve the problems of low detection efficiency, large mechanical error, long detection time and large amount of data processing in the prior art

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