Hybrid hemispherical resonator micro-gyro and machining process thereof

Abstract

The invention discloses a hybrid hemispherical resonator micro-gyro, and belongs to the field of micro-electro-mechanical systems and inertial navigation. The hybrid hemispherical resonator micro-gyro is composed of an upper-layer glass substrate, an electrode layer, a silicon structure layer and a lower-layer glass substrate which are arranged in sequence from top to bottom. A round cavity is formed in the center of the upper-layer glass substrate, the center of the electrode layer and the center of silicon structure layer, and a hemispherical shell harmonic oscillator is arranged in the round cavity and fixed to the silicon structure layer through a supporting handle. The electrode layer comprises an electrode and a peripheral anchor point structure used in cooperation with the electrode, and the upper-layer glass substrate is provided with an electrode hole used in cooperation with the electrode, and small bonding pads evenly distributed at the edge of the upper-layer glass substrate and connected with the electrode hole in the upper-layer glass substrate through metal leads respectively. The invention further discloses a machining process of the hybrid hemispherical resonator micro-gyro. According to the micro-gyro, vacuum encapsulation is completed when anodic bonding is carried out on the structure layer and the glass substrates, so that process steps are reduced; according to the machining process, machining cost is reduced.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical and inertial navigation, and in particular relates to a hybrid hemispherical resonant micro-gyroscope and a processing technology thereof. Background technique [0002] The hemispherical resonant gyroscope is a Coriolis vibrating gyroscope. It not only has the advantages of high precision, resolution, reliability and radiation resistance, but also is recognized as the gyroscope with the longest service life at present. It can It has been working continuously for more than 15 years and keeps its performance unchanged. In addition, its advantages in space applications are unmatched by other gyroscopes. [0003] The United States was the first country to develop the hemispherical resonant gyroscope. In 1956, it first applied for and obtained the invention patent of the hemispherical resonant gyroscope. The traditional hemispherical resonant gyroscope is made of fused silica, which is difficul...

AI Technical Summary

Problems solved by technology

However, due to the late start of research on hemispherical resonant gyroscopes in my country and the low level of micro-processing technology, there is still a certain gap with foreign processing technologies.

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