Disc multiple-ring inner S-shaped flexible beam resonant gyro and preparation method thereof

A resonant gyroscope, flexible beam technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, measurement device, etc., can solve the problems of hemispheric resonant gyroscope offset, inaccurate dynamic load connection, etc., to achieve structural stability , The effect of simple processing steps and good symmetry

Active Publication Date: 2016-04-13
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

However, since the rod part of the early rod structure resonators needs to be assembled on the micromechanical mechanism, higher d

Method used

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  • Disc multiple-ring inner S-shaped flexible beam resonant gyro and preparation method thereof
  • Disc multiple-ring inner S-shaped flexible beam resonant gyro and preparation method thereof
  • Disc multiple-ring inner S-shaped flexible beam resonant gyro and preparation method thereof

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Embodiment Construction

[0052]The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0053] Such as Figure 1A , Figure 1B , Figure 1C As shown, the present embodiment provides an S-shaped flexible beam resonant gyroscope in a disc multi-ring, including:

[0054] A base 100, the base 100 has a central cylinder and 8 protruding sector ring parts on the secondary periphery and 8 electrode sheets on the outermost periphery;

[0055] A disk multi-ring S-shaped flexible beam resonator 102, including a central cylinder, a plurality of S-shaped flexible beams, a plurality of concentri...

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Abstract

The invention provides a disc multiple-ring inner S-shaped flexible beam resonance gyro and a preparation method thereof. The disc multiple-ring inner S-shaped flexible beam resonant gyro comprises a substrate, a disc multiple-ring inner S-shaped flexible beam resonator and a group of electrodes distributed at the periphery of the disc multiple-ring inner S-shaped flexible beam resonator, wherein the disc multiple-ring inner S-shaped flexible beam resonator comprises a central cylinder, a plurality of S-shaped flexible beams, a plurality of concentric rings and a plurality of groups of spokes, the central cylinder is connected with the substrate, the concentric rings are connected through a plurality of spokes, two ends of each of the plurality of S-shaped flexible beams are connected with the central cylinder and the inner side of the smallest concentric ring in the plurality of concentric rings, and each of the electrodes is connected with the substrate. The disc multiple-ring inner S-shaped flexible beam resonance gyro has the advantages of a small size, stable structure, sensitive response, etc.; and the gyro has good symmetry, so high performance is obtained.

Description

technical field [0001] The invention relates to a gyroscope in the field of micro-electromechanical technology, in particular to a resonant gyroscope with S-shaped flexible beams in a disc multi-ring and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can sensitively detect the angle or angular velocity of the carrier, and plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working life...

Claims

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Application Information

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IPC IPC(8): G01C19/5656G01C19/5663
CPCG01C19/5656G01C19/5663
Inventor 张卫平朱甲强唐健邢亚亮
Owner SHANGHAI JIAO TONG UNIV
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