RF atomic power microscope scanning probe and preparation method thereof

Abstract

The invention discloses an RF atomic power microscope scanning probe and a preparation method thereof. The preparation method comprises the main steps of: firstly, acquiring mesa isolation of an RF transmission line on a substrate made of high-resistance silicon-on-insulator materials through adopting photolithography and etching technologies; secondly, forming ohmic contact through adopting photolithography, electron beam evaporation and rapid annealing technologies; thirdly, acquiring the RF transmission line through adopting photolithography and electron beam evaporation technologies; and finally, forming the integral probe adopting photolithography etching technologies, wherein the integral probe comprises a probe body, a probe cantilever beam and a probe tip. When the obtained probe is used for performing reactance scanning on a sample, an RF circuit is extremely sensitive to reactance (capacitance and inductance), changes in surface reactance of the sample can cause capacitance to change, thus an RF resonant signal offsets. The high-speed characteristic of the RF circuit is utilized, the RF resonant signal serves as feedback, the problem of slow scanning of an atomic power microscope is solved, and the function of high-speed scan imaging is achieved.

Description

technical field [0001] The invention relates to an atomic force microscope scanning probe, in particular to a high-speed readout radio frequency atomic force microscope scanning probe and a preparation method thereof, belonging to the field of microscopic morphology imaging. Background technique [0002] Atomic Force Microscope (AFM) uses the micro-cantilever to sense and amplify the force between the sharp probe on the cantilever and the atoms of the sample under test, and to achieve the purpose of detection by detecting the force between the atoms, and obtain the microcosm of the sample surface. shape. It can perform high-precision imaging at the micro-nano scale on the surface topography of conductors, semiconductors, and insulators. It is an analytical instrument used to study the surface structure of solid materials. Because AFM has the advantages of high spatial resolution at the atomic level, can provide three-dimensional surface maps, has no special requirements for...

AI Technical Summary

Problems solved by technology

In addition, the resonance frequency of the cantilever directly determines the maximum imaging speed of the AFM, and the working speed is relatively slow.

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