Surface acoustic wave element and method of manufacturing the same

一种声表面波器件、制造方法的技术，应用在声表面波器件和声表面波器件的制造领域，能够解决部件发生异常等问题，达到提高可靠性、提升利润幅度、增强结合力的效果

Active Publication Date: 2016-05-11
TIANJIN WISOL ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] At this time, it is produced by forming a cavity in the piezoelectric element. When forming such a cavity, if the adhesive force between the piezoelectric body, the electrode, and the wiring is reduced, there is a problem in an environment of continuous high humidity. There is a very high probability of component failure

Method used

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  • Surface acoustic wave element and method of manufacturing the same
  • Surface acoustic wave element and method of manufacturing the same
  • Surface acoustic wave element and method of manufacturing the same

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Embodiment Construction

[0034] The purpose and technical concept of the present invention and the details of its application effect can be clearly understood through the following detailed description of the accompanying drawings of the specification of the present invention. Hereinafter, embodiments according to the present invention will be described with reference to the drawings.

[0035] figure 1 , 2 It is a cross-sectional view and a perspective view schematically showing a surface acoustic wave device according to an embodiment of the prior art.

[0036] refer to figure 1 There is a method for manufacturing surface acoustic wave devices: using a wafer-level packaging method and using a photosensitive resin such as photoresist (PhotoResist) to seal the cavity (Cavity) on the piezoelectric element.

[0037] At this time, the surface acoustic wave device can include all kinds of machines that use surface acoustic wave (SAW), such as: surface acoustic wave filter, surface acoustic wave sensor, ...

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Abstract

The present invention relates to a surface acoustic wave element and a method of manufacturing the same, and more specifically, to a surface acoustic wave element and a method of manufacturing the same, the element including a piezoelectric substrate; a plurality of IDT electrodes formed on the piezoelectric substrate; a plurality of resonator electrodes formed on the piezoelectric substrate; a wiring metal layer formed as a wiring area to electrically connect the plurality of IDT electrodes and the plurality of resonator electrodes; and an insulation layer formed on the piezoelectric substrate, the plurality of IDT electrodes, the plurality of resonator electrodes and the wiring metal layer.

Description

technical field [0001] The present invention relates to a surface acoustic wave device and a manufacturing method thereof, and in more detail to a surface acoustic wave device and a method for manufacturing the surface acoustic wave device. The surface acoustic wave device includes: a piezoelectric substrate; a plurality of forks Refers to transducer (IDT, InterDigitalTransducer) electrodes, which are formed on the piezoelectric substrate; a plurality of resonator electrodes, which are formed on the piezoelectric substrate; metal layers for wiring, which are formed as a wiring region for electrically connecting the plurality of IDT electrodes and the plurality of resonator electrodes; an insulating layer formed on the piezoelectric substrate, the plurality of IDT electrodes, and the plurality of resonator electrodes Electrodes, above the metal layer for wiring. Background technique [0002] Surface Acoustic Wave Filter (SAWFilter; SurfaceAcousticWaveFilter) When an electric...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/64H03H3/02
CPCH03H9/1071H03H9/02992H10N30/01H10N30/06
Inventor 李勋龙
Owner TIANJIN WISOL ELECTRONICS CO LTD
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