Force/magnetism multifunctional sensor
A sensor and multi-functional technology, applied in the field of sensors, to achieve the effects of small size, improved accuracy, and improved sensitivity
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[0087] The present invention will be described in detail below, and the features and advantages of the present invention will become clearer and clearer with these descriptions.
[0088] The dedicated word "exemplary" here means "serving as an example, embodiment, or illustration." Any embodiment described herein as "exemplary" need not be construed as being superior or better than other embodiments. Although various aspects of the embodiments are shown in the drawings, unless otherwise noted, the drawings are not necessarily drawn to scale.
[0089] According to the present invention, a force / magnetic multifunctional sensor is provided, such as figure 1 As shown, it includes a first cantilever beam (Beam1) for detecting an applied magnetic field, and a second cantilever beam (Beam2) for detecting an applied force. The first cantilever beam includes a first thin film transistor TFT1, a second thin film transistor TFT2, a third thin film transistor TFT3, a fourth thin film transis...
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