Transparent medium film refractive index and thickness on-line measuring method

Abstract

The invention discloses a transparent medium film refractive index and thickness on-line measuring method. The method comprises the following steps: obtaining a film surface reflection spectrum: using an on-line spectrum measuring apparatus for measuring a film surface reflection spectrum of a predetermined wavelength scope of a film sample to be measured; setting Cauchy optical model parameters: according to the characteristic of the film surface reflection spectrum and influence of the parameter in the Cauchy optical model to a refractive index dispersion relation, performing initial setting of the thickness and Cauchy optical model parameters to form an initial value; performing a genetic algorithm: by using the genetic algorithm and combining the film surface reflection spectrum, through the initial value, controlling a genetic process by setting the parameters of the genetic algorithm, and finally obtaining the film refractive index and film thickness. By establishing the film Cauchy optical model and fully combining the genetic algorithm, reasonable parameters can be set according to the spectrum characteristic of the practical films, so that analysis convergence speed can be faster, and result can be more accurate.

Description

technical field [0001] The invention relates to the field of coated glass, in particular to an online measurement method for the refractive index and thickness of a transparent medium film layer. Background technique [0002] Off-line Low-E (low-E) coated glass has good energy-saving performance and has been widely used in doors, windows, curtain walls and other construction fields. However, the film structure of off-line Low-E coated glass is complex, with more than 5 layers, each The optical performance of the product will affect the final quality of the product, resulting in a long product design and development cycle and complicated production process control. [0003] In order to make film system design and process control directional and reduce development and debugging costs, film system design software is currently used to build models and evaluate the performance of designed products and process debugging plans in advance, but the key to using film system design sof...

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Problems solved by technology

[0004] The existing professional measuring instruments are not convenient and simple to use in the actual production control of the factory, so it is difficult for the general factory to obtain the accurate optical constant and thickness of the actual film in time, resulting in a disconnection between the input parameters and the actual when using the film system design software

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