Micro-torsion mirror driven by one-side unequal height comb teeth

Abstract

The invention discloses a micro-torsion mirror driven by one-side unequal height comb teeth, a device layer of the mirror is used for manufacturing a movable mirror surface structure of the micro-torsion mirror and a reflecting layer and a torsional supporting beam of the movable mirror surface structure and structures including a fixed anchor point, a dynamic and static comb teeth pair, a static comb anchor point, a pad and the like; a substrate layer is used for manufacturing a back cavity; and a buried oxide layer is used for electrical isolation between the device layer and the substrate layer. For solving the problem that the oscillation starting direction of the micro-torsion mirror driven by equal height comb teeth manufactured by SOI is uncontrollable and can not identified through capacitance detection, the thickness of the comb teeth is changed, the dynamic comb teeth and static comb teeth on one side of the torsional supporting beam are manufactured as an unequal height comb teeth pair, the other side maintains an equal height comb pair, the capacitance maximum value position of the comb teeth pairs on the two sides of the torsional supporting beam is deviated a structure balance position of the movable mirror surface structure, the oscillation starting direction the manufactured micro-torsion mirror is ensured, the direction information is provided through the capacitance detection, so that the closed-loop control is realized.

Description

【Technical field】

[0001] The invention belongs to the field of Micro-Opto-Electro-Mechanics (MOEMS), relates to Micro-Electro-Mechanical Systems (MEMS) technology and micro-machining technology, in particular to a single-side unequal-height comb-teeth electrostatically driven micro-torsion mirror based on SOI technology and a preparation method thereof. 【Background technique】

[0002] Compared with traditional beam deflection elements, micro-torsion mirrors have the advantages of low energy consumption, miniaturization, and easy integration. Their applications in consumer electronics, communications, biomedicine, military defense, and other fields continue to expand, and they are research hotspots in the field of optical MEMS. Electrostatic comb-driven micro-torsional mirrors, especially the vertical non-offset comb-driven micro-torsional mirrors based on monolithic silicon-on-insulator (SOI), have a simple structure, high energy density, can achieve large rotation angles, an...

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