Device and method for manufacturing micro-nano structures

Abstract

The invention discloses a device and a method for manufacturing micro-nano structures. The device comprises a linear stepper motor (1), a movement platform (2), a movable barrier (3), a barrier support (4), a base (5) and an electric control device (6). The method includes fixing carried materials onto the movement platform (2) and then depositing first materials on unsheltered surfaces of the carried materials; driving the carried materials on the movement platform (2) by the linear stepper motor (1) under the control of the electric control device to move towards unsheltered directions, and depositing second materials on unsheltered and un-deposited surfaces of the carried materials; fetching the carried materials on the movement platform (2) and stripping and treating the first materials to obtain the micro-nano structures. The device and the method have the advantages that the materials can be led into specific regions on the surfaces of the carried materials, accordingly, the utilization rate of raw materials can be increased, mold plates can be omitted, the micro-nano structures can be manufactured at a low cost, flow processes are simple, the device and the method are high in speed, and originally complicated molding of structures or devices such as micro structures, nano structures and nano circuits becomes simple and accurate.

Description

technical field [0001] The invention relates to a micro-nano product molding device and a molding method thereof, belonging to the field of micro-nano device molding. Background technique [0002] With the development of nanotechnology, there are more and more demands for micro-nano systems, micro-nano scale parts and related products. Whether it is the processing of Micro Electro Mechanical System (MEMS) parts or the construction of micro-nano functional structures, it is inseparable from the micro-nano structure manufacturing and processing technology. With the continuous breakthrough of cutting-edge technology, new processing methods are constantly produced and improved. , Extreme manufacturing technology will inevitably become the key development direction of modern processing technology. [0003] At present, the micro-nano structure processing technology mainly includes lithography technology, nano-imprint technology, electron (ion) beam lithography technology, laser d...

AI Technical Summary

Problems solved by technology

Among them, lithography technology and nano-imprint technology need to use specific template devices in the processing process; electron (ion) beam lithography technology, laser direct writing technology and laser printing technology have slow processing speed and low output; self-assembly The technical process is relatively simple, but the structural shape of the fabrication cannot be controlled

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