Positive and negative amplitude-modulation pulse driven electrostatic probe and data acquisition and analysis integrated device

A technology of data acquisition and analysis and amplitude modulation pulse, which is applied in the direction of electrical components, plasma, etc., to achieve the effect of avoiding precision defects and avoiding self-heating effects

Inactive Publication Date: 2016-06-22
安徽酷熠电磁科技有限公司
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Problems solved by technology

Therefore, the measurement range of current acquisition also needs to span 5 orders of magnitude, which is a difficulty of current measurement methods
Moreover, the price of

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  • Positive and negative amplitude-modulation pulse driven electrostatic probe and data acquisition and analysis integrated device
  • Positive and negative amplitude-modulation pulse driven electrostatic probe and data acquisition and analysis integrated device
  • Positive and negative amplitude-modulation pulse driven electrostatic probe and data acquisition and analysis integrated device

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Embodiment Construction

[0011] Combine below figure 1 , figure 2 , image 3 To further illustrate the technical solution of the present invention. figure 1 The shown is a positive and negative amplitude modulation pulse driving electrostatic probe and data acquisition and analysis integrated device, which consists of a positive and negative amplitude modulation pulse generator (1), a square wave pulse signal (2), a driving circuit (3), and a probe bias signal (4), Langmuir probe (5), synchronous pulse signal (6), DSP data processing system (7), current acquisition signal (8), current signal reading (9), current signal (10), current signal acquisition The system (11) is composed of a host computer system (12), and its characteristics are: the positive and negative amplitude modulation pulse generator (1) generates two signal outputs, and one output is a square wave pulse signal (2) after being amplified by the drive circuit (3) Provides the probe bias signal (4) for the Langmuir probe (5); the oth...

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Abstract

The invention discloses a positive and negative amplitude-modulation pulse driven electrostatic probe and a data acquisition and analysis integrated device. After being amplified, a square wave pulse signal having an adjustable amplitude is used as the bias voltage of a Langmuir probe; a current signal acquisition system rapidly acquires current in a specific current acquisition point on each pulse bias voltage; then, the voltage is decreased to 0; after being naturally cooled, the probe applies and acquires the next pulse square wave; therefore, the self-heating effect of the probe is avoided; furthermore, a soft-switching technology and a large-range current measurement means are adopted in the current signal acquisition system; the precision disadvantage of micro-nano acquisition of ionic current is avoided; finally, after synchronous voltage signals and current signals are processed and calculated through a DSP data processing system, the parameters of the Langmuir probe, such as the V-I characteristic curve, the electronic temperature, the energy distribution, the electron density and the space potential, are obtained; and the parameters are conveniently displayed in an upper computer system.

Description

technical field [0001] The invention relates to the field of plasma science and technology, in particular to an electrostatic probe driven by positive and negative amplitude modulation pulses and an integrated device for data collection and analysis. Background technique [0002] Electrostatic probe technology is one of the necessary tools for the diagnosis of low-pressure plasma parameters. Although the probe measurement theory has been developed and matured 100 years ago, the actual measurement error has been relatively rough, resulting in the probe measurement data only having an order of magnitude reference. significance. We analyze the source of the error. Among them, the electron saturation flow is too large, which makes the error caused by the increase of the internal resistance caused by the self-heating of the probe significant. In actual use, the probe voltage is driven by an external power supply, and the current passes through the measured plasma and the probe t...

Claims

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Application Information

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IPC IPC(8): H05H1/00
CPCH05H1/00
Inventor 陈兆权丘汉标宋晓
Owner 安徽酷熠电磁科技有限公司
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