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Closed magnetic circuit magnetic core film suitable for on-chip solenoid inductor and preparation method thereof

A technology of closed magnetic circuit and magnetic core film, applied in circuits, inductors, printed inductors, etc., can solve the problems of large high-frequency hysteresis loss, unfavorable uniaxial anisotropy stability, etc., and improve the coupling factor , The effect of increasing the coupling factor and increasing the inductance value

Active Publication Date: 2018-04-06
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

N.Sato et al. (N.Sato, A.El-Ghazaly, R.M.White, and S.X.Wang, Domain structure of micro-patterned CoZrTa with 45degree induced anisotropy for isotropic high permeability, IEEETrans.Magn., Vol.51(11), 2801704 , Nov.2015.) discloses a rectangular solenoid inductor, the uniaxial anisotropic magnetic core film forms a 45o angle with the long and short sides of the rectangle, which is a better magnetic core film, but the research It is found that there are more magnetic domains in the patterned magnetic core film, that is, this kind of magnetic core film is not conducive to the stable existence of uniaxial anisotropy, and it is easy to cause large high-frequency hysteresis loss

Method used

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  • Closed magnetic circuit magnetic core film suitable for on-chip solenoid inductor and preparation method thereof
  • Closed magnetic circuit magnetic core film suitable for on-chip solenoid inductor and preparation method thereof
  • Closed magnetic circuit magnetic core film suitable for on-chip solenoid inductor and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] A closed magnetic circuit magnetic core film suitable for on-chip solenoid inductors, comprising two isotropic rectangular magnetic core films and two anisotropic rectangular magnetic core films, the length a of the isotropic rectangular magnetic core film is 540 μm , the width b is 280 μm, the length c of the anisotropic rectangular magnetic core film is 370 μm, and the width is 240 μm, the long side of the obtained closed magnetic circuit core film is 930 μm, and the short side is 540 μm; the effective magnetic permeability of the magnetic core film is 600, the resistivity is 1000μΩ·cm, the thickness is 3μm, and the magnetic core film material is FeCoTiO nanoparticle magnetic core film.

Embodiment 2

[0034] The difference between this embodiment and Embodiment 1 is only that the thickness of the magnetic core film is 6 μm.

Embodiment 3

[0036] The difference between this embodiment and Embodiment 1 is that the thickness of the magnetic core film is 10 μm.

[0037] Figure 4 It is a performance test comparison curve of the solenoid micro-inductor of the closed magnetic circuit magnetic core film based on the embodiment 2 and the comparative example, wherein, L represents the inductance value, Q represents the quality factor, and Lm represents the mutual inductance. Depend on Figure 4 It can be seen that under the premise of maintaining a similar quality factor, the inductance value of the micro-inductor is increased from 25nH in the comparative example to 43nH in the embodiment 2, and the coupling factor representing the ratio of the mutual inductance to the inductance is also increased from 0.12 in the comparative example to that in the embodiment 2. 0.47.

[0038] Figure 5 The performance test curves of the micro-inductors formed by the closed magnetic circuit magnetic core films of Examples 1, 2, and 3. ...

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Abstract

A closed magnetic circuit magnetic core film suitable for on-chip solenoid inductors, comprising two isotropic rectangular magnetic core films and two anisotropic rectangular magnetic core films, the length of the isotropic rectangular magnetic core film is The short sides of the closed magnetic circuit magnetic core films have the same width, and the width b of the isotropic rectangular magnetic core film is 70-420 μm. The two uniaxial anisotropic magnetic core films located on the long side of the closed magnetic circuit magnetic core film of the present invention make the inductance on both sides difficult to be excited, and have high saturation current characteristics, and the two isotropic magnetic core films located on the short side The core film makes the magnetic force line bend to form a closed loop, which improves the coupling factor; the closed magnetic circuit structure and higher coupling factor make the inductance value based on the magnetic core film of the present invention significantly improved, and realize the rectangular solenoid Inductor areal density exceeding 100nH / mm2 in coupled inductors.

Description

technical field [0001] The invention relates to a magnetic core film in an electromagnetic device and a magnetic sensor device, in particular to a high coupling factor closed magnetic circuit magnetic core film structure suitable for on-chip solenoid inductance and a preparation method thereof. Background technique [0002] With the rapid development and application of portable and wearable devices, higher requirements are placed on the integration and low power consumption of electronic components. As a magnetic energy storage element, the power thin film inductor can realize many functions in cooperation with the electric energy storage element, such as filtering, impedance transformation, oscillator, voltage regulator, etc., and can also be used as an antenna in a radio frequency identification (RFID) system to realize information transmission. and receiving etc. [0003] At present, the new generation of very high frequency (VHF) and ultra high frequency (UHF) on-chip t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01F17/00H01F41/18
CPCH01F17/0006H01F41/18H01F2017/0066
Inventor 白飞明孟德欢王骆张怀武钟智勇
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA