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A terahertz bandpass filter tuned by electrostatic actuation

A band-pass filter and electrostatic drive technology, applied in the terahertz field, can solve the problems of limiting the applicable range of the device and the non-adjustable transmittance at the center frequency position, so as to improve performance and expand the application range

Active Publication Date: 2018-07-03
GUILIN UNIV OF ELECTRONIC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Most of the commercialized terahertz bandpass filters are made of metal grid structure. After this type of filter is manufactured, it can only be transparent to specific terahertz wave frequencies, and the position of the center frequency and its transparency The overrate is not adjustable, which greatly limits the applicable range of the device

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  • A terahertz bandpass filter tuned by electrostatic actuation
  • A terahertz bandpass filter tuned by electrostatic actuation
  • A terahertz bandpass filter tuned by electrostatic actuation

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Embodiment Construction

[0026] A terahertz bandpass filter adjusted by electrostatic driving according to the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0027] This embodiment of a terahertz bandpass filter tuned by electrostatic actuation is figure 1 and 2 As shown, there is a two-dimensional array on a silicon substrate 1, a movable frame 4 and a plurality of electrostatic comb drives 6.

[0028] In this example, the two-dimensional array has a total of 9×6 array units, and the side length is 1620 μm×1100 μm. In this example, the diameter of the incident terahertz beam is 1100 μm. In this example, the silicon substrate 1 has a square through hole, the center of the through hole 13 coincides with the center of the two-dimensional array, and the side length of the through hole 13 is 1.1 mm.

[0029] The terahertz wave enters from above the two-dimensional array, passes through the two-dimensional array to be filtered...

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Abstract

The invention discloses a terahertz band-pass filter adjusted through electrostatic driving. A through hole is formed in a silicon substrate and a two-dimensional array is arranged on the silicon substrate. A terahertz wave enters the filter from the upward side of the two-dimensional array, penetrates through the two-dimensional array to obtain a filtered wave, and the filtered wave is emitted out from the through hole. A rectangular moveable frame sleeves the two-dimensional array, active comb teeth of an electrostatic comb teeth driver are connected with the left and right sides of the frame. U-shaped structures or fat T-shaped structures in the same row of the array are connected with the inner side of the frame. The front and back ends of the frame are respectively connected with a folded spring. A direct current voltage drives the electrostatic comb teeth driver to work, the driver drives the moveable frame to move, the U-type structures and the fat T-type structures move relatively to change the distance between them, and the transmittance and the center frequency of the band-pass filter are adjusted and controlled, so that the performance of the terahertz band-pass filter is improved significantly, and the application range is expanded.

Description

technical field [0001] The invention relates to the technical field of terahertz, in particular to a terahertz bandpass filter adjusted by electrostatic driving. Background technique [0002] Terahertz wave (Terahertz, referred to as THz) refers to the electromagnetic wave between microwave and infrared spectrum, the frequency range is 0.1THz to 10THz (1THz=10 12 Hz), which is a special region between ultra-high frequency microwaves and far-infrared radiation on the electromagnetic spectrum. Terahertz waves have the advantages of good safety (no ionization), strong penetrability, and fingerprint characteristics for material identification. They are widely used in important fields such as airports, customs safety supervision, biomedicine, and industrial nondestructive testing. One of the key technologies in the application of terahertz technology is how to manipulate terahertz waves. In practical applications, due to environmental noise and application requirements, it is n...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P1/20
CPCH01P1/20
Inventor 胡放荣李鹏陈元枝王月娥陈涛牛军浩王志远殷贤华张文涛韩家广
Owner GUILIN UNIV OF ELECTRONIC TECH