A terahertz bandpass filter tuned by electrostatic actuation
A band-pass filter and electrostatic drive technology, applied in the terahertz field, can solve the problems of limiting the applicable range of the device and the non-adjustable transmittance at the center frequency position, so as to improve performance and expand the application range
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[0026] A terahertz bandpass filter adjusted by electrostatic driving according to the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0027] This embodiment of a terahertz bandpass filter tuned by electrostatic actuation is figure 1 and 2 As shown, there is a two-dimensional array on a silicon substrate 1, a movable frame 4 and a plurality of electrostatic comb drives 6.
[0028] In this example, the two-dimensional array has a total of 9×6 array units, and the side length is 1620 μm×1100 μm. In this example, the diameter of the incident terahertz beam is 1100 μm. In this example, the silicon substrate 1 has a square through hole, the center of the through hole 13 coincides with the center of the two-dimensional array, and the side length of the through hole 13 is 1.1 mm.
[0029] The terahertz wave enters from above the two-dimensional array, passes through the two-dimensional array to be filtered...
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