Alignment device and evaporation equipment

An alignment device and vapor deposition technology, applied in the field of production and manufacturing, can solve the problems of long process shutdown and maintenance time, affecting the cost of OLED screens, etc., achieve high alignment accuracy and simplify the alignment process.

Inactive Publication Date: 2016-07-20
BOE TECH GRP CO LTD
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  • Abstract
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AI Technical Summary

Problems solved by technology

In the mass production line of OLED evaporation, due to the position deviation of the mask plate in the vacuum environment, the process will take a long time to stop and repair, which will seriously affect the cost of the OLED screen

Method used

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  • Alignment device and evaporation equipment
  • Alignment device and evaporation equipment
  • Alignment device and evaporation equipment

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Embodiment Construction

[0024] In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

[0025] The present invention firstly provides an alignment device, which is used to align the target object, the structure is as follows Figure 1A , Figure 1B shown, including:

[0026] Guiding mechanism 101;

[0027] The second magnetic field generating mechanism 102 located on the guiding mechanism 101 and the first magnetic field generating mechanism 103 arranged opposite to the second magnetic field generating mechanism 102;

[0028] Wherein, under the action of the interaction force between the second magnetic field generating mechanism 103 and the first magnetic field generating mechanism 103, the second magnetic field generating mechanism 102 slides along the guide mechanism 101 to push the target object to the device. position.

[0029] It c...

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PUM

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Abstract

The invention provides an alignment device and evaporation equipment. The alignment device is used for aligning a target object and comprises a guiding mechanism, a second magnetic field generation mechanism located on the guiding mechanism and a first magnetic field generation mechanism which is arranged opposite to the first magnetic field generation mechanism, wherein in the state that the second magnetic field generation mechanism is mutually repulsive to the first magnetic field generation mechanism, the second magnetic field generation mechanism slides along the guiding mechanism, so that the target object is pushed to a preset position. The evaporation equipment comprises 1-4 groups of alignment devices provide by any embodiment of the invention, and the alignment devices are used for aligning the 1-4 corners of a mask plate. By adopting the alignment device and the evaporation equipment provided by the invention, the mask plate can be aligned conveniently and rapidly.

Description

technical field [0001] The invention relates to the technical field of production and manufacturing, in particular to an alignment device and evaporation equipment. Background technique [0002] The OLED (Organic Light-Emitting Diode, organic electro-laser display) evaporation process requires a mask to form a specific pattern during the evaporation process. Due to the different substrate structures, some substrates need to replace the mask plate multiple times in one chamber, that is, the robot needs to frequently pick and place in the Cassette (evaporation box) and multiple different evaporation chambers. The evaporation mask plate is a metal mask plate corresponding to the entire substrate. It has a large mass and is easily shifted in the chamber and Cassette during frequent replacement. In the mass production line of OLED evaporation, due to the position deviation of the mask plate in the vacuum environment, the process will take a long time to stop and repair, which wi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 付文悦王小虎藤野诚治
Owner BOE TECH GRP CO LTD
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