Stacked filter and image sensor containing the same

Abstract

The invention discloses a stacked filter for an image sensor containing an infrared ray pixel. The stacked filter includes a first filter layer disposed at the IR pixel. The first filter layer allows light with wavelengths of a first band to be transmitted through. The stacked filter further includes a second filter layer stacked with the first filter layer. The second filter layer allows light with wavelengths of a second band to be transmitted through. The first band partially overlaps the second band at wavelengths of a third band. The third band is narrower than the first band and the second band. The stacked filter allows light with the wavelengths of the third band to be transmitted through. Furthermore, an image sensor containing a stacked filter is also provided. The stacked filter is easy to manufacture, and the characteristics of the stacked filter have no relation with the angle of the incident ray and are not influenced by the angle of the incident ray. Therefore, the stacked filter can avoide generation of blue shift situation when an inclined incident ray with a large angle irradiates on the image sensor.

Description

Technical field [0001] The present invention relates to the field of stacked filters, in particular to a stack of image sensors that integrates infrared pixels and red, green and blue pixels in a single sensor in the application of time-of-flight (ToF) technology Filters and image sensors with stacked filters. Background technique [0002] At present, time-of-flight (ToF) technology has been widely used in modern industries, and can provide three-dimensional (3D) images through the combination of complementary metal oxide semiconductor (CMOS) pixel arrays and adjustable light sources . Three-dimensional time difference (3DToF) cameras have been used in many different applications, such as contour inspection of manufactured goods, computer aided design (CAD) verification, geographic measurement, and object imaging. [0003] The operation of the three-dimensional time difference ranging (3DToF) camera is to use an adjustable light source to illuminate the scene, observe the light r...

AI Technical Summary

Problems solved by technology

However, traditional optical filters are usually manufactured by multi-layer film interference technology. When the incident light with a large oblique angle falls on the traditional optical filter, there will always be blue-shifting (blue-shifting) phenomenon. On conventional filters, the blue shift shifts the spectrum of the conventional filter towards lower wavelength bands

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