Automatic tailing method for CZ-80 single crystal furnace

Abstract

The invention relates to the technical field of growth of single crystal silicon rods by lifting of a single crystal furnace, in particular to an automatic control method for a specific single crystal furnace, and particularly discloses an automatic tailing method for a CZ-80 single crystal furnace.By using an existing single crystal growth PLC (programmable logic control) system of the CZ-80 single crystal furnace, temperature adjusting and single crystal lifting speed parameters are set, the length and diameter of single crystal tailing are controlled, and automatic tailing of single crystal is achieved; tailing time in the growth process of single crystal silicon rods can be shortened, tailing efficiency can be improved, tail breakage rate upon tailing can be decreased, tailing capacity can be improved, tailing cost can be decreased, and a tailed shape is made attractive.

Description

technical field [0001] The invention relates to the technical field of growing single crystal silicon rods by pulling a single crystal furnace, in particular to an automatic control method for a specific single crystal furnace. Background technique [0002] CZ-80 crystal growth equipment (single crystal furnace) is mainly used to pull 6-9 inch large diameter, low oxygen carbon single crystal silicon rods, equipped with PLC automatic control system, melting material 140KG, produced by Hebei Jinglong Sunshine Equipment Co., Ltd. Produced by the company, it has excellent performance and has been widely used. [0003] At present, there is no automatic finishing process of CZ-80 single crystal furnace, and the single crystal finishing process operation must be carried out by manually controlling the single crystal pulling speed and temperature calibration of the single crystal furnace and other related parameters. After the growth of the single crystal isodiameter, it starts to ...

AI Technical Summary

Problems solved by technology

However, there are many problems in the manual finishing operation: the finishing temperature and pulling speed cannot be controlled in time, and the pulling speed cannot be increased in a timely and effective manner when the pulling speed needs to be increased, resulting in a long finishing time, resulting in a longer finishing time of more than 3.5 hours, low efficiency, and the shape of the finishing Unsightly; Manual finishing speed and temperature adjustment is large, many mistakes, easy to close the tail, the tail docking rate is about 30%, the pass rate is low, and the cost is high

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