Thermon structure and fabrication method for heat-activated miniature self-heating getter

Abstract

The invention relates to the field of vacuum packaging technologies for MEMS (micro-mechanical systems) sensors, in particular to a heater structure for heating and activating micro-miniature self-heating air suction agents and a method for manufacturing the heater structure. The heater structure comprises a ceramic body, metal slurry, metal coatings and metal leading wires. The inside of the ceramic body is divided into a plurality of layers, the metal slurry wraps each layer, metal slurry layers are communicated with one another in the up-down directions, the metal slurry on two end surfaces of the ceramic body is reserved to be exposed, the metal coatings are formed on two end surfaces of the ceramic body by means of chemical plating or electroplating, and the metal leading wires of heating electrodes are welded on the two end surfaces of the ceramic body after the metal coatings are formed. The heater structure and the method have the advantages that resistance of the metal slurry layers is controlled, so that the consistency of resistance values of different devices can be guaranteed; whether heating and activating temperatures reach ideal activating temperatures of air suction materials or not can be monitored by special circuits in an online manner and can be controlled, accordingly, the activated air suction agents can be assuredly in the optimal activated states, and the activated states of the air suction agents are consistent and stable on a large scale.

Description

technical field [0001] The invention relates to the technical field of vacuum packaging of MEMS sensors, in particular to a thermon structure and a manufacturing method for heating and activating a miniature self-heating getter. Background technique [0002] Sensors with MEMS structures such as infrared thermal imaging and THz require high-vacuum, constant temperature, and small-volume packaging. The traditional metal shell packaging and ceramic shell packaging process realizes the packaging of special sensor chips. In order to meet the special working environment conditions and packaging requirements of high vacuum, constant temperature, and long life, it is usually used to install a getter in the package shell to maintain the sensor chip. Vacuum required for normal operation, thus increasing the life of the sensor. When the getter is used, it needs to be heated to a certain temperature to activate the getter properties of the material, and then vacuum-packed to maintain t...

AI Technical Summary

Problems solved by technology

If the contact is poor, the contact resistance is too large or even larger than the resistance of the wire heater, which may cause the electrode contact point to melt or fuse due to overheating

At the same time, the resistance of the contact electrode will have a deviation of several milliohms or tens of milliohms, and the overall resistance deviation for the activation of the entire wire heater is tens of percent. When the wire heater is energized and activated, the same heating Current, due to the deviation of resistance, the deviation of its heating power may be a multiplied deviation

In the same way, the resistance difference of the metal wire as a heating resistor is very small because the overall resistance is only tens to hundreds of milliohms, so the resistance value deviation of several milliohms to more than ten milliohms may produce low heating power. Large deviation, the existence of this type of resistance deviation seriously affects the stability and consistency of the getter activation state, and ultimately affects the production yield of vacuum packaged devices, and its quality stability and consistency are also affected

[0005] Another problem is the insulation treatment of the metal wire. The usual treatment process is to simply perform oxidation and insulation treatment on the surface of the straight wire heater, and for the outer surface of the metal wire that is made into a spiral shape, an S shape, etc. to increase the resistance , usually requires electrophoretic alumina insulation treatment, which has complex processing technology, low yield, and high cost, even exceeding the cost of the getter material itself

In the actual use process, it often happens that the insulating layer on the surface of the metal wire is broken, resulting in a short circuit between the metal wire and the getter material, causing the getter to directly fail and be discarded.

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